| Line Filter P/N |
Flow rate Nm3/min |
Grade DP 1μm |
Grade GP 1μm, 0.5ppm |
Grade HE 0.01μm, 0.01ppm |
Grade AC 0.003ppm |
| 123 | 3.45 | 88343181 | 88343124 | 88343157 | 88343215 |
| 216 | 6.05 | 88343199 | 88343132 | 88343165 | 88343223 |
| 275 | 7.7 | 88343207 | 88343140 | 88343173 | 88343223 |
| 350 | 9.8 | 88344254 | 88344239 | 88344247 | 88344262 |
| 481 | 13.46 | 88343330 | 88343272 | 88343306 | 88343363 |
| 563 | 15.76 | 88343348 | 88343280 | 88343314 | 88343371 |
| 706 | 19.76 | 88343355 | 88343298 | 88343322 | 88343389 |
| 850 | 23.8 | 88343488 | 88343421 | 88343454 | 88343512 |
| 1100 | 30.8 | 88343496 | 88343439 | 88343462 | 88343520 |
| 1380 | 38.63 | 88343504 | 88343447 | 88343470 | 88343538 |
Malaysia
