FYRA High Vacuum Gauge 7.5 x 10-6 to 1000 Torr - TriSENS Gauge, UL, CSA, CE

详情

The FYRA High Vacuum Gauge is paired with the TriSENS DPCP Quantum Sensor, which is a combined pirani, piezo, and capacitance manometer. It measures from 1000 Torr down to 7.5 x 10-6 Torr. The combined usage of the ultra wide range TriSENS DPCP and FYRA can eliminate the use of multiple sensors to interpret processes and data.
Vacuum Science Simplified
We know vacuum applications can get complicated. FYRA was created to deliver scientific measurement and vacuum control simply with easy integration into almost any system in the market. FYRA Features:

• Easy integration into systems
• Capable of driving multiple types of sensors (ex. piezo, thermal, active, passive, and capacitance manometers)
• Has touchscreen and dial interface
• Intuitively display and manage multiple sensors + control points
• Comes standard with:
  • 10 Volt DC output for PLC integration
  • USB for data download + documentation of vacuum processing data-points

TriSens | DPCP Quantum Sensor
The DigiVac TriSens DPCP Quantum Gauge is an ultra wide range vacuum sensor that combines the novel Quantum pirani with piezo technology to deliver a measurement range of 7.5 x 10 -6 to 1000 Torr. 0-10V output, RS232 and 1 relay included.
This sensor establishes new standards with an all-in-one wide range measurement solution for a wide selection of vacuum applications. This transducer is an overall cost-effective solution with an ultra-wide 9 decade range that includes 5 decades of gas independent measurement. The Digivac TriSENS combines 3 technologies: Quantum Pirani, Capacitance, Piezo into an all-in-one gauge.
Sensor Details:
Measurement Range: 7.5 x 10-6 to 1000 Torr
Accuracy Specifications:
1000 Torr to .001 Torr = +/- 3%
.0001 Torr to 10-6 Torr = +/- 20%

• Combines 3 vacuum technologies: MEMS Pirani, Capacitative Manometer, and Piezo technology
• 0-10V for PLC Input
• All in one high vacuum measurement, process control, and overpressure indication
• Reliable solid-state relay for process control
• Highly accurate direct pressure measurement down to 10 microns (.01 Torr) + high vacuum measurement down to 10-6
• Ultra-wide 9 decade range that includes 5 decades of gas independent measurement
• Integrated baffle helps protect sensor elements from particulate contamination and increases longevity; no ion gauge required

High Vacuum Gauge Advantages

• Deep & wide measuring range of 9 decades delivered by an all-in-one gauge that combines pirani,
  capacitance manometer, and piezo technology
• 6 decades of gas independent measurement| 5×10^-3 to 1333 mbar
• Reliable solid-state relay for process control
• 0-10V for PLC Input
• LED Color Pressure Indicator
• Robust ceramic capacitance diaphragm gauge
• Mountable in any orientation without impact on performance

Applications:

• Mass spectrometers
• Scanning electron microscopes
• Furnace heat treatment
• PVD coating of glass, optics, tools, etc.
• Refrigeration service and manufacturing
• Semiconductor processing

 

Measuring Range	1×10-5 to 1333 mbar (7.5×10-6 to 1000 Torr)
Measuring principle 1×10-6 to 1×10-3 mbar	MEMS Pirani thermal conductivity
Measuring principle 5×10-3 to 3.99 mbar	Capacitance manometer
Measuring principle 6 to 1333 mbar	MEMS piezo diaphragm
Measurement Accuracy (Torr)
From	To	Accuracy
7.5×10-6	7.5×10-5	50%
7.5×10-5	7.5×10-3	20%
7.5×10-3	1000 Torr	3%

 
Technical Specifications

Units	Torr, mbar, kPa, microns, millitorr, mmHg, Hectopascal
Control Range	Ability to support 10-10 Torr – 1000 Torr
Dimensions	6.5″x6.5″x2.5″
Telemetry Options	USB, Wifi, 0-10 volts Analog out, 0-10 volts Analog in
Sensor Support	MKS Convectron: 275071 (1/8″ NPT), 275203 (KF16);   DigiVac: SEN-VGT500, SEN-775i, Quantum (SEN-DPP, SEN-DCP, SEN-DPCP);  Pfeiffer: PKR251, IKR251;   Agilent: FRG700, PCG-750, PCG700, 531, 536, 531 equivalent, or PVG 500;   Setra: 730 capacitance manometers;   Inficon: PSG500, PSG550, Porter, SKY, Stripe, MAG, MPG & MPG400
Valve Support	Dinamo, VacStable (Bleed), Solenoid-type Bellows and Plunger, 24V valves that are less than 24 Watts

Compatible Sensors:

Sensors supported include:
Inficon	MPG400/401 PSG5xx ATM to Medium Vacuum Gauge Gemini MAG500 Cold Cathode Gemini MPG500 Cold Cathode Pirani PCG550 Porter SKY Stripe MAG
MKS	AA01, 722B, 730B Convection: 27571 (1/8″ NPT), 275203 (KF16)
KJLC	KJLC Pirani KJLC Cold Cathode KJLC Cold Cahtode Pirani AGC 0.1 T CM AGC 0.5 T CM AGC 1 T CM AGC 5 T CM AGC 10 T CM AGC 20 T CM AGC 50 T CM AGC 100 T CM AGC 1000 T CM
Agilent	PVG-500 PVG-550 IKR251 FRG-700 FRG-720 PCG-750 PCG-700 536 531 CDG500 1 T CM CDG500 10 T CM CDG500 100 T CM CDG500 1000 T CM
Edwards	ASG2, APG200-XM, WRG200
DigiVac	SEN-VGT500 SEN-775i Quantum (SEN-DPP, SEN-DCP, SEN-DPCP)
Pfieffer	PKR251 IKR251
Leybold	Ceravac: 1, 10, 100, 1000T CM Thermovac: TTR 91, TTR 96, TTR 97, TTR 101, TTR 200N
Sentra	730 capacitance manometer

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