Vacuum Pumps

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With respect to the final pressure different pumps are available:

• Single-step rotary piston pump for a max. final pressure of approx. 20 mbar.
• Two-step rotary piston pump for a max. final pressure of approx. 10-2 mbar.
• Turbomolecular pump stand (rotary vane pump with following turbomolecular pump for a max. final pressure of 10-5 mbar.
• Independent pressure gauge for a pressure range of 10-3 mbar or 10-9 mbar as additional equipment

Information:
For protection of the vacuum pump only cold stage evacuation is allowed. The reduction of working tube strengthness limits the max. possible working temperature under vacuum.