Agilent / Varian
Agilent MS Series Rotary Vane Pumps
Agilent MS Series Rotary Vane Pumps

 

Agilent MS Series Rotary Vane Pumps

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Rotary Vane Pumps
MS Series Rotary Vane Pumps


Agilent MS Series high capacity, single stage, oil-lubricated rotary vane pumps are powerful, compact and environmentally-friendly alternatives to larger industrial pumps with similar speeds. The flexible MS Series features robust and reliable components, high pumping speed at low pressure, low noise and easy installation. Our reliable pumps are often used in combination with Turbomolecular or Diffusion HV pumps in a wide range of industry applications including metallurgy, heat treatment, vacuum coating, electron beam welding (EBW), Helium leak detection and liquefied natural gas (LNG) transportation.


Order Information

X3760-64003 MS-01 oil, 22 L
9495087 Minor spare part kit, MS-631
X3753-64089 Frameless upgrade kit, for standard MS-631 rotary vane pump
9495088 Major spare part kit, MS-631
9495090 Oil filter (Type B), MS series rotary vane pumps
9495083 Inlet filter polyester cartridge, MS-301 large rotary vane pump
X3753-64000 MS-631FL rotary vane pump, frameless, 400/690 V, 50 Hz, DN150 DIN2534
X3753-64002 MS-631FL rotary vane pump, frameless, heavy duty, 400/690 V at 50 Hz,460 V at 60 Hz, DN150 DIN2534
X3753-64091 MS-631FL Rotary Vane Pump, Frameless, 400/690V,50Hz-460V,60Hz,FullOpti
X3753-64006 MS-631 rotary vane pump, frameless, 18.5 kW, 220/380 V, 60 Hz, DN150 DIN2534
X3753-64093 MS-631FL Rotary Vane Pump, Frameless, 220/380V, 60Hz, Full Optional
X3753-64004 MS-631FL rotary vane pump, frameless, 230/460 V, 60 Hz, DN150 DIN2534
X3753-64092 MS-631FL Rotary Vane Pump, Frameless, 230/460V, 60Hz, Full Optional
9495070 Oil filter (Type A), MS series rotary vane pumps
9495089 Inlet filter polyester cartridge, MS-631 large rotary vane pump
9499375M007 Oil drain extension, MS series rotary vane pumps, 0.5 inch, right angle elbow


Specifications

MS Series Rotary Vane Pumps Pumping Speed Description Features Specifications
MS-101 60 Hz: 109 m3/hour, 64 cfm
50 Hz: 95 m3/hour, 56 cfm		 Discover Agilent’s compact MS-101 rotary vane pump, delivering stable industrial performance with low noise.
  • Powerful and efficient industrial performance and stability for a wide range of applications
  • Environmentally friendly and cost-effective due to reduced power requirements
  • Highly efficient oil circulation system ensures excellent lubrication and sealing in all critical areas
  • Cover design optimizes cooling air channels
  • Floating valve for better oil recovery and integrated heat exchanger carries away excess heat
  • Robust, high quality components and fittings ensure superb sealing
 Outline Drawing
X

MS-101 Outline Drawing


Technical Specifications
X

MS-101 Technical Specifications


Pumping Speed Curve
X

MS-101 Speed Curve


Ordering Details
X

MS-101 Ordering Details
MS-301 60 Hz: 290 m3/hour, 170 cfm
50 Hz: 250 m3/hour, 150 cfm
  • High pumping speed, even at low pressures, and smooth performance across the entire operating pressure range due to shorter cycle times
  • Excellent industrial performance in applications ranging from manufacturing and cryogenics to process technology and pharmaceutical uses
  • Low operating ultimate partial pressure of ≤ 8 x 10-2 mbar (≤ 6 x 10-2 Torr) with gas ballast close1d
  • Environmentally-friendly demister system and floating valve for enhanced oil management
  • Optimized cooling design with air channels and integrated heat exchanger
  • Reliable and efficient oil circulation for improved lubrication and sealing
 Outline Drawing
X

MS-301 Outline Drawing


Technical Specifications
X

MS-301 Technical Specifications


Pumping Speed Curve
X

MS-301 Speed Curve


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MS-631 60 Hz: 680 m3/hour, 400 cfm
50 Hz: 590 m3/hour, 350 cfm
  • Highly robust for challenging industry applications and operating conditions
  • Proven performance in pharmaceuticals, manufacturing, coatings systems, process technology, and metallurgy and heat treatments
  • Low operating ultimate partial pressure of ≤ 8 x 10-2 mbar (≤ 6 x 10-2 Torr) with gas ballast close1d
  • Integrated demister system limits oil exhaust over working pressures, and floating valve for oil recovery
  • Easy to install - small physical footprint
  • Optimized design maximizes cooling air channels and an integrated heat exchanger removes excess heat
 Outline Drawing
X

MS-631 Outline Drawing


Tecnical Specifications
X

MS-631 Technical Specifications


Pumping Speed Curve
X

MS-631 Speed Curve


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MS-631FL Frameless High-capacity Single stage, oil lubricated rotary vane pump, that can be directly coupled to an Agilent Roots Pump (up to RP-3001 size) without the need of a frame. Ideal for thin-film coatings, vacuum meallurgy, helium leak detection and electron beam welding.
  • Anti-suckback valve prevents system contamination
  • Floating oil recovery valve
  • Carbon composite vanes extend pump life
  • Air cooled
  • Oil recirculation system
  • Minimum footprint
  • Easy to service
 Outline Drawing
X

MS-631FL Outline Drawing


Technical Specifications
X

MS-631FL Technical Specifications


Pumping Speed Curve
X

MS-631FL Speed Curve


Ordering Details


Literature


Rotary Vane Pumps Catalog

Catalog with features and benefits of Agilent's Rotary Vane Pumps


AVF Platinum Vacuum Fluid

Features and benefits, properties and ordering details for AVF Platinum Vacuum Fluid.
 

AFV 60 Gold Vacuum Fluid

Features and benefits, properties, and ordering details for AVF 60 GOLD Vacuum Fluid.


High Capacity Rotary Vane Pumps and Roots Pumping Systems

Features, benefits, and technical specifications of the High Capacity MS-Series Rotary Vane Pumps & RPS-Series Roots Pumping Systems


Support

User Manuals

MS-101 High Capacity Rotary Vane Pump User Manual

Instructions for use and technical specifications for MS-101 High Capacity Rotary Vane Pump Model X3751A

MS120 Single Stage Rotary Vane Pumps user manual

Instructions for use and technical specifications for the MS120 Single Stage Rotary Vane Pumps

MS 120 Major Maintenance user manual

Instructions for use and technical specifications for the MS 120 Major Maintenance

MS-301, MS-631 High Capacity Rotary Vane Pumps user manual

Instructions for use and technical specifications for MS-301, MS-631 High Capacity Rotary Vane Pumps

MS-631FL High Capacity Rotary Vane Pump User Manual

Instructions for use and technical specifications for the MS-631FL High Capacity Rotary Vane Pumps

 

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