Features
| Pumping speed | KF 40 | CFF 2.75" | ISO 63 / CFF 4.5” |
| Ar | 44 l/s | 57 l/s | 66 l/s |
| N2 | 49 l/s | 56 l/s | 67 l/s |
| He | 38 l/s | 46 l/s | 63 l/s |
| H2 | 36 l/s | 40 l/s | 53 l/s |
|
Gas throughput at full rotational speed (with recommended forepump) |
Air cooling (25°C) | Water cooling (25°C, 65 l/h) | |
| N2 | 100 sccm | 100 sccm | |
| Ar | 70 sccm | 70 sccm | |
| Compression ratio & Foreline tolerance | Compression ratio | Foreline tolerance | |
| Ar | > 1.0 x 1011 | > 14 mbar | |
| N2 | ≥ 1.0 x 1011 | > 14 mbar | |
| He | 2.0 x 106 | > 12 mbar | |
| H2 | 5.0 x 104 | > 4 mbar | |
| Base pressure with recommended forepump (5 m3/h) | < 8.0 x 10-10 mbar (< 6.0 x 10-10 Torr) | ||
| Inlet flange | CFF 4.5”, ISO 63 | ||
| CFF 2.75”, KF 40 | |||
| Foreline flange | KF16 | ||
| Rotational speed | 81,000 rpm (1350 Hz driving frequency) | ||
| Start-up time | < 2 minutes | ||
| Recommended forepump | Mechanical: | Agilent DS-42/102 | |
| Dry pump: | Agilent SH-110/IDP-3 | ||
| Operating position | Any | ||
| Operating ambient temperature | 5 °C to 35 °C | ||
| Relative humidity of air | 0 - 90 % (not condensing) | ||
| Bakeout temperature | 80°C at inlet flange max (ISO flange) | ||
| 120°C at inlet flange max (CFF flange) | |||
| Lubricant | Permanent lubrication | ||
| Cooling requirements | Air flow temperature: (5 to 35 °C ambient) | ||
| Water (mandatory if ambient temperature > 35 °C): | |||
| Water temperature: | 15 °C to 25 °C | ||
| Minimum flow: | 65 l/h (0.30 GPM) | ||
| Pressure: | 2 to 4 bar (45 to 75 psi) | ||
| Noise pressure level | < 40 dB(A) at 1 meter, full speed | ||
| Storage temperature | -40° C to 70° C | ||
| Max altitude | 3000 m | ||
| Weight kg (lbs) | Pump ISO 63 | 2.05 kg | |
| Pump CFF 4.5” | 3.50kg | ||
| Pump CFF 2.75” | 3.34kg | ||
| Pump KF 40” | 2.37kg | ||
| Conformity to Norms | EMC | 61326-1 | |
| Safety (CE/CSA) Regulatory | DIR 2006/42/CE | ||
| ROHS | DIR 2011/65/EU | ||
|
Accessories
|
Malaysia
