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Agilent’s family of vacuum Stainless Steel Tube Valves are designed to connect our rough vacuum and high vacuum pumps to your system. Delivering maximum conductance and sized for easy, convenient installation, these valves are ideally suited for systems requiring high reliability with low outgassing. Excellent low outgassing characteristics are derived from the valve’s fusion welded 304 stainless steel body, welded AM-350 stainless steel nesting bellows and small cross section elastomers and do not contain any blind internal cavities. In combination with our popular hardware products, the new stainless steel valves offer a complete, bundled solution for your vacuum system, making it possible for convenient one-stop shopping for everything required to connect Agilent vacuum pumps to your system.
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Long life edge welded bellows actuator seal for 1.5 Million life cycle
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TIG welded internal body joints
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Electropolished interior and exterior surfaces
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ConFlat metal seal flanges, recommended for ultrahigh vacuum service
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KF, ISO flanges for quick elastomer seals, ideal for high vacuum applications requiring frequent assembly and disassembly
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Tube-Weld ports for permanent connections
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Manual and Electropneumatic actuators
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Viton® elastomer bonnet seals
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Optional Magnetic reed switch position indicators
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Optional Air control solenoid valves for 115VAC, 240VAC and 24VDC service
Pressure Range |
Atmosphere to 1 x 10-8 mbar (7.5 x 10-9 Torr) |
Leak Rate |
< 1 x 10-9 std cc/sec He |
Service Life (bellows) |
1.5 million cycles (minimum) |
Mounting Position |
Any |
Baking Temperature |
Valve open |
Valve closed |
Position indicator (A/O optional) |
Solenoid (A/O optional) |
200°C (392°F) |
150°C (302°F) |
70°C (158°F) |
60°C (140°F) |
Conductance |
3/4 in. Angle |
3/4 in. In-line |
1 in. Angle |
1 in. In-line |
1½ in. Angle |
1½ in. In-line |
6 l/sec |
5 l/sec
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15 l/sec |
13 l/sec |
48 l/sec |
44 l/sec |
Materials |
Valve body |
Bellows |
Bellows flange |
Seal plate |
Bonnet gasket |
O-rings |
304L SS |
AM-350 |
304 SS |
304 SS |
Viton (V747) |
Viton (V747) |
Pneumatic Valves |
Air Connection |
1/8 in. NPT |
Air Pressure |
60 psig (minimum) |
80 psig (maximum) |
Open/Close Time |
3/4 in. Valves |
1 in. Valves |
1 ½ in. Valves |
<0.5 seconds |
<0.5 seconds |
<0.8 seconds |
Solenoid (Optional) Supply Voltages: |
110/120 V,50/60 Hz 220/240 V, 50/60 Hz 24 VDC |
Air Cylinder Volume |
3/4 in. Valves |
1 in. Valves |
1 ½ in. Valves |
0.049 L |
0.049 L |
0.1 L |
Valve Position |
No mechanical indicator (see optional position indicator) |
Position Indicator (Optional) |
Voltage |
Current |
Power |
Visual Indicator |
5-240VDC/AC |
100 mA (maximum) |
10 W (maximum) |
Green LED |
Switching Logic |
SPST normally open |
Ordering Instructions: • Use only the Product Number list in the Product Number column. • Numbers in the Option Number column are for reference only; use Short Description for ordering options. Example Order: for a right angle, 1 1 /3” pneumatic valve with position indicator for the valve, and a spare position indicator: Item 1: X3200A: Agilent Stainless Steel Tube Valve, Right Angle Option: Pneumatically Operated, 1 1 /3” ConFlat (021) Option: Position indicator with LED light (060) Item 2: X3200-63000: Position indicator (as a separate spare part) Note: Items are delivered as separate items in the same box, for assembly upon arrival. For assistance with assembly, please see the video on Agilent Chem Vacuum YouTube Channel. Configuration Product Option Actuation Size Flange Short Description Number Number Right Angle Stainless Steel Tube Valve X3200A 001 Manual ¾” ConFlat, 1 1 /3” Manually operated, 1 1 /3” ConFlat In-line Stainless Steel Tube Valve X3201A 002 Manual 1” ConFlat, 2 ⅛” Manually operated, 2 ⅛” ConFlat 003 Manual 1 ½” ConFlat, 2 ¾” Manually operated, 2 ¾” ConFlat 004 Manual ¾” Tube End, ¾” Manually operated, ¾” Tube End 005 Manual 1” Tube End, 1” Manually operated, 1” Tube End 006 Manual 1 ½” Tube End, 1 ½” Manually operated, 1 ½” Tube End 007 Manual ¾” NW16 Manually operated, NW16 008 Manual 1” NW25 Manually operated, NW25 009 Manual 1 ½” NW40 Manually operated, NW40 021 Pneumatic ¾” ConFlat, 1 1 /3” Pneumatically operated, 1 1 /3” ConFlat* 022 Pneumatic 1” ConFlat, 2 ⅛” Pneumatically operated, 2 ⅛” ConFlat* 023 Pneumatic 1 ½” ConFlat, 2 ¾” Pneumatically operated, 2 ¾” ConFlat* 024 Pneumatic ¾” Tube End, ¾” Pneumatically operated, ¾” Tube End* 025 Pneumatic 1” Tube End, 1” Pneumatically operated, 1” Tube End* 026 Pneumatic 1 ½” Tube End, 1 ½” Pneumatically operated, 1 ½” Tube End* 027 Pneumatic ¾” NW16 Pneumatically operated, NW16* 028 Pneumatic 1” NW25 Pneumatically operated, NW25* 029 Pneumatic 1 ½” NW40 Pneumatically operated, NW40* * For pneumatically operated valves choose Solenoid and Position Indicator Options if desired - See Accessories Options table below. Accessory Options (shipped with valves for installation upon arrival) Add Option Number Solenoid, 24VDC 050 Solenoid, 110VAC 051 Solenoid, 220VAC 052 Position Indicator with LED 060 Service Parts (Ordered separately) Order Part Number Solenoid, 24VDC X3200-63024 Solenoid, 110VAC X3200-63110 Solenoid, 220VAC X3200-63220 Position Indicator with LED X3200-63000 Spare Parts Part Number Bellows Replacement Kit, NW16/25 X3200-67000 Bellows Replacement Kit, NW40 X3200-67001
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