Ambient Operating Temperature |
|
Ambient Storage Temperature |
|
Base Pressure |
-
< 1 x 10-10 mbar
-
< 1 x 10-10 Torr
|
Compression Ratio H2 |
|
Compression Ratio He |
|
Compression Ratio N2 |
|
Compression Ratio Side Port H2 |
|
Compression Ratio Side Port He |
|
Compression Ratio Side Port N2 |
|
Cooling Method |
-
Air cooling
-
Water cooling
|
FlangeType |
|
Foreline Flange Size |
|
Foreline Tolerance - N2 |
|
Maximum Gas Throughput - He, Water Cooling |
|
Maximum Gas Throughput - N2, Water Cooling |
|
Noise Level |
|
Nominal Rotation Speed |
-
60600 rpm (1010 Hz driving frequency)
|
Operating Position |
|
Pumping Speed - H2 |
|
Pumping Speed - He |
|
Pumping Speed - N2 |
|
Pumping Speed Side Port H2 |
|
Pumping Speed Side Port He |
|
Pumping Speed Side Port N2 |
|
Recommended Forepump Capacity |
|
Standards and Certifications |
-
EN 61010-1
-
EN 61326-1
-
EN 1012-2
-
EN 12100
-
EN 50581
-
Machinery Directive 2006/42/EC
-
Electromagnetic Compatibility Directive 2014/30/EU
-
Directive 2011/65/EU
|
Start Up Time |
|
Weight |
|