Typical applications for the Model ESR80W dry vacuum pump include load locks, SEM, Etch, CVD, PVD, Ashing and Ion Implant processes that require the best vacuum performance and optimum uptime.
The ESR Series vacuum pumps achieve a low cost of ownership by integrating precision machining, multiple pumping stages, improved DC motors and intelligent controls for throttle adjustments and idle mode utilizations.
Pumping Speed (60 Hz): 4,000~8,500 l/min
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