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Tetrafluoromethane (CF4), also known as carbon tetrafluoride or R-14, is the simplest perfluorocarbon (PFC). It is a colorless, odorless, and non-toxic gas that is neither flammable nor corrosive. CF4 is chemically inert and has a very high bond strength due to the nature of the carbon-fluorine bond. This makes it very stable and resistant to chemical attack. As a result, CF4 is used in a variety of applications, including:
- Semiconductor manufacturing: CF4 is used in the plasma etching of semiconductors to remove unwanted material from the surface of wafers.
- Electronics: CF4 is used as a dielectric gas in high-voltage applications, such as transformers and switchgear.
- Refrigeration: CF4 was once used as a refrigerant, but it has been largely replaced by other refrigerants that have a lower global warming potential (GWP).
- Fire suppression: CF4 is used in some fire suppression systems, as it is a very effective fire suppressant.
- Aerosols: CF4 is used as a propellant in some aerosol sprays.
- Tracers: CF4 is used as a tracer gas to study atmospheric circulation and ocean currents.
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