Mahr Metrology - CWM 100: 马来西亚的首选 Obsnap Instruments Sdn Bhd

详情

3D optical measurement system – confocal microscope with integrated white light interferometer – for measurement and evaluation of surface structures and small components

High precision - non-contact measurement of surface structures
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Fast measurement - short measuring time

Features

For measurements on technical, optical and reflecting surfaces as well as on printed circuit boards (semiconductor industry) a 3D topographical analysis (areal measurement) with high information density is required. Soft and thin-walled materials also require non-contact measurement. Moreover, ever higher levels of surface quality are being achieved, greatly increasing the requirements placed on measuring systems in terms of resolution and measuring accuracy.
Highly accurate and non-conatct measurement of surface structures.
High precision with sub-nanometer resolution
Main application field for the confocal sensor is the measurement of rough and dark surface structures and small components.
Main application field for the white light interferometer is the measurement of fine, polished and shiny surface structures including glass and optical surfaces
Microscope field of view, easily enlargeable by fully automated stitching procedure

Technical Data

Measuring principle	By interferometer, by white light interferometer and confocal Light source (KFM and WLI): LED, 505 nm
Measuring range mm	Sensor unit can be moved 100 mm in Z, CNC controlled Object table can be moved 100 mm in X and Y, CNC controlled Interferometer, white light interferometer: Measuring range (WLI): More as 4 mm (Standard mode), more as 20 mm in extended mode Confocal microscope: Measuring range (KFM): Up to 10 mm (depending on resolution in Z and lens)
Interfaces	230 V, 50 Hz

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