Trek 646 Software-Driven Electrostatic Chuck Supply, Output Voltage Range 0 to ±3 kV

ELSO Technologies Sdn Bhd

分类: E-Chuck Supplies 当前有货

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Software-Driven Electrostatic Chuck Supply, Output Voltage Range 0 to ±3 kV

Advanced Energy’s Trek 646 software-driven electrostatic chuck supply offers versatility and performance for use in multiple processes.

Output Phasing: 0 to ±3 kV
Output Voltage Range: 0 to ±3 kV
Output Current Range: 0 to ±6.5 mADC with a peak capability of 10 mA

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