3D Measurement System with with light interferometer
Measuring principle
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By interferometer, by white light interferometer
Light source (WLI): LED, 505 nm |
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Measuring range mm
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Sensor unit can be moved manually over 200 mm in Z
Object table can be moved manually in X and Y Interferometer, white light interferometer: Measuring range (WLI): Up to 100 µm (vertical). More on request. |
Interfaces
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230 V, 50 Hz
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