Direct acting 3-port valve (3QR/3QB/3QE/3QZ)

Handles compact 3-port valve applications across the board. (Air operated valve/cylinder drive, suction transport,
air blow, etc.)

3QE / Z Series for positive pressure only,
3QB Series for positive and negative pressure,
3QR Series with large flow rate for positive and negative pressure.

[Cylinder bore size: φ6 to φ20]

• Semiconductor manufacturing process (pre-process)
• Semiconductor manufacturing process (post-process)
• Oxygen concentrator
• Dialysis monitoring equipment
• Dental equipment