Penerangan
Two 3-port valves are installed in 1 valve station to reduce installation space. The outlet position of the supply and exhaust port can be selected, increasing freedom in piping management.
[Cylinder bore size: φ4 to φ16]
Industry:
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Semiconductor manufacturing process (pre-process)
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Components for chemical liquid supply facilities
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Components for chemical gas supply facilities
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N2 purging related products
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