The Agilent 80 L/s turbo pump, TwisTorr 84 FS, combines TwisTorr drag stage technology and Agilent Floating Suspension (FS) to provide high performance, reliability, and economy. This 80 L/s turbo pump delivers high vacuum performance thanks to the synergy between turbo technology and innovative TwisTorr drag stages. Floating Suspension assures low vibration and acoustical noise for compatibility with sensitive instrumentation and work environments.
This small turbo pump is perfectly suited for a wide range of applications, including research and development, UHV systems, nuclear research and electron microscopy.
The TwisTorr 84 FS is available with onboard or rack controllers.
Features
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Pumping speed: With CFF 4 ½” or ISO 63: With CFF 2 ¾”: With KF 40: |
N2: 67 l/s
N2: 56 l/s
N2: 49 l/s
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He: 63 l/s/
He: 46 l/s
He: 38 l/s
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H2: 53 l/s
H2: 40 l/s
H2: 36 l/s
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Ar: 66 l/s
Ar: 57 l/s
Ar: 44 l/s
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Gas throughput at full rotational speed (with recommended forepump) Air cooling (35 °C) Water cooling (25 °C, 65 l/h) |
N2: 100 sccm N2: 100 sccm |
Ar: 70 sccm Ar: 70 sccm |
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| Compression ratio: | N2: ≥1 x 1011 | He: 2 x 106 | H2: 5 x 104 | Ar: >1 x 1011 |
| Base pressure* (with recommended forepump) | <5 x 10-10 mbar (< 3.75 x 10-10 Torr) | |||
| Inlet flange |
CFF 4 ½” O.D. CFF 2 ¾” O.D. |
ISO 63 KF40 |
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| Foreline flange | KF 16 NW | |||
| Rotational speed | 81,000 rpm (1350 Hz driving frequency) | |||
| Start-up time | <2 minutes | |||
| Recommended forepump |
Mechanical: Agilent DS 40M - DS 102 Dry pump: Agilent IDP-3, SH 110 |
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| Operating position | Any | |||
| Operating ambient temperature | +5 °C to +35 °C | |||
| Relative humidity of air | 0 - 90 % (not condensing) | |||
| Bakeout temperature |
120 °C at inlet flange max. (CFF flange)
80 °C at inlet flange max. (ISO flange)
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| Lubricant |
Permanent lubrication
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| Cooling requirements |
Air Cooling: Water Cooling: |
Air flow temperature +5 °C to +35 °C Cooling water temperature: +15 °C to +25 °C Minimum flow: 65 l/h (0.30 GPM) Pressure: 2 to 4 bar (45 to 75 psi) |
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| Noise pressure level (at 1 mt at full speed) | 40 dB(A) * | |||
| Storage temperature | -40 °C to +70 °C | |||
| Max altitude | 3000 m | |||
| Certifications | CE, C-CSA-US, RoHS compliant as per 2011/65/UE | |||
| Weight kg (lbs): |
Pump ISO 63:
2.5 (5.5) |
Pump CFF 4½” :
3.5 (7.7) |
Pump CFF 2 ¾”:
3.34 (7.35) |
Pump KF 40:
2.37 (5.22) |
Malaysia
