Agilent / Varian Turbo-V 1K-G Turbo Pump

Agilent / Varian Turbo-V 1K-G Turbo Pump

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Penerangan


Turbo-V 1K-G


 
The Agilent high throughput turbomolecular pump, Turbo-V 1K-G, is a dedicated vacuum pumping system, designed specifically as a turbo pump for thin film deposition equipment. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of Argon under high temperature load.

This robust turbo pump is suitable for harsh manufacturing environments because of its rugged design. Typical industrial vacuum coating applications include physical vapor deposition (PVD), solar and flat panel display manufacturing.

The pump's robust design and its advanced electronics, rack type or onboard solution, make the Agilent Turbo-V 1K-G the optimum pumping solution for the vacuum coating industry.


Features


Specifications

Technical Specifications

Pumping speed:
ISO 160:
ISO 200:

Ar: 750 l/s
Ar: 1,040 l/s
 

N2: 810 l/s
N2: 1,080 l/s
 

He: 950 l/s/
He: 1,150 l/s
 

H2: 680 l/s
H2: 730 l/s
 
Compression ratio: Ar: 5 x 108 N2: 5 x 107 He: 4 x 104 H2 1.5 x 104
Base pressure* (with recommended forepump) <1 x 10-10 mbar      
Inlet flange ISO 160F, ISO 200F      
Foreline flange
ISO 160:
ISO 200:
KF 25 NW
KF 40 NW
     
Nominal rotational speed 45,500 rpm      
Start-up time <5 minutes      
Minimum recommended forepump > 20 m3/h (TriScroll 600, DS 602)      
Operating position Any      
Operating ambient temperature +5 °C to +35 °C      
Bakeout temperature
 
80 °C at inlet flange max. (ISO flange)
     
Vibration level (displacement)
<0.01 μm at inlet flange
 
     
Cooling requirements Water      
Power supply
Input voltage: 100-240 Vac
Max operating power:
< Input freq.: 50 - 60 Hz
400 W using Nitrogen and lighter gases (water cooling setting)
260 W using Argon (air cooling setting)
Max input power: 600 VA Stand-by power: 30 to 35 W  
Protection fuse (Navigator controller) 1 x 6.3 A      
Serial communication (Navigator Kit) RS232 cable with a 9-pin D type male connector and a 9-pin D type female connector, and Navigator software (optional)    
Storage temperature -20 °C to +70 °C      
Weight
26.8 kg (59.1 lbs)
 
 
 
 
 
 
 
 
 
 
 
* According to standard DIN 28 428.


Literature

A-PLUS software release 2.0.2

A-PLUS software (formerly T-plus) - release 2.0.2 - communication, control and monitoring software designed to leverage the intelligence of Agilent vacuum products. 2 versions: 32-bit and 64-bit versions of Windows.

Support
FAQs
User Manuals

Special Turbo-V 1K-G User Manual

Instructions for use and technical specifications for Special Turbo-V 1K-G

Turbo-V 1K-G

User Manual for Turbo-V 1K-G Pump and Navigator controller

Turbo-V 1K-G Controller installation with Eccentric Plate instructions

Instructions for use for the Turbo-V 1K-G Controller installation with Eccentric Plate

TURBO-V 1 K-G RETROFIT

Instructions for use and technical specifications for the Turbo-V 1 K-G retrofit

Gas Purge valve instructions

Instructions for use and technical specifications for Gas Purge Valve

Turbo-V 1KG Rack Controller user manual

Instructions for use and technical specifications for the Turbo-V 1KG rack controller



Order Information

Part number Description
9698839 T-V1001 NAVIG PUMP.SYS-CFF 10 IN.120/220
9698930 Turbo-V1001 Navigator IIN ISO 200
9698931 TURBO-V1001 NAVIGATOR PUMP ISO 200
9698932 TURBO-V1001 NAVIGATOR PUMP CFF 10in
9698933 Turbo-V1001 Navigator Pump ISO 160
9698934 TURBO-V1001 NAVIGATOR PUMP ISO 250
9698946 TURBO-V1001 NAVIGATOR PUMP ISO 200F
9698947 Turbo-V1001 Navigator Pump ISO 250F
9698978 TURBO-V1001 NAVIGATOR CONTROLLER
9698978M005 TURBO-V1001 NAVIGATOR CONTROLLER FOR V1K
EX9698931 EXCH.TURBO-V1001 NAVIGAT.PUMP ISO 200
EX9698932 EXCH.TURBO-V1001 NAVIGAT.PUMP CF 10in
EX9698978 EXCHANGE V1001 NAVIGATOR CONTR. 120/220V
EX9698978M005 EXCHANGE V1001 NAV. CONTR. FOR V1K


Accessories and spare parts
Part Number Description
9699958 Mains cable NEMA Plug, 3m long
9699957 Mains cable European Plug, 3m long
9699883 Serial cable and Navigator Software
9699304 Inlet screen ISO 160
9699316 Inlet screen ISO 200
9699825 Water cooling kit (hose tail G ¼)
9699826 Water cooling kit (Inox G ¼)
9699108 Vent flange, NW 10 KF / M8
9699831 Vent device with adjustable delay time for standard rack controller
9699843 Vent valve for standard rack controller
9699834 Vent valve for Navigator Controller
9699241 Purge valve KF16-M12 20 SCCM
9699242 Purge valve 7/16-M12 20 SCCM
9499335 Rotary Vane pump DS 602, with 1 ph, worldwide motor
9499336 Rotary Vane pump DS 602, with 3 ph, worldwide motor
9499360 Rotary Vane pump HS 452, with 1 ph, worldwide motor
9499365 Rotary Vane pump HS 652, with 1 ph, worldwide motor
PTS06001UNIV Dry pump TriScroll 600, with 1 ph, worldwide motor
PTS06003UNIV Dry pump TriScroll 600, with 3 ph, worldwide motor
PTS06001INV Dry pump TriScroll 600 inverter, with 1 ph, worldwide motor
9698978M005 Turbo Controller Navigator, 120V-220V for TV-1K-G
9699454M004 Turbo Controller Rack, 120V-220V for TV-1K-G


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