Agilent / Varian HS-20 Diffusion Pump: Pilihan Utama di Malaysia, Penang, Singapore, Indonesia Hexo Industries (M) Sdn Bhd

Penerangan

Available in 2 in. and 16 in. through 35 in. sizes, the low-cost HS-series pumps provide high speed, low ultimate pressure, high throughput, high tolerable forepressure, and low backstreaming. The HS-Series diffusion pumps come with full thermal protection and optional quick-cool coils. The 16 in. through 35 in. pumps come with sight glass/fill and drain assemblies, and are available with ASA or ISO flanges.

Features

Five-stage fractionating jet purifies pumping fluid and assures low base pressure.
High tolerable forepressure.
Full thermal protection.
Fluid-level sight glass provides quick indication of pump fluid status at all times.
Fill and drain assembly for pump oil.
Standard gauge port (NW-25) below inlet flange included.
Foreline baffle prevents loss of fluid into backing pump system.
Optional halo baffle reduces backstreaming without adding height.
Ordering Details
Download HS-20 Diffusion Pump 3D Model

Specifications

Technical Specifications

Pumping Speed,Operating Range Pumping Speed, AVS 4.1 (1963)	10,000 l/s air, 12,500 l/s He and H2 17,500 l/s Air
Maximum Throughput	12.5 T-l/s (16.7 mbar l/s) in operating range, 18 T-l/s (23 mbar-l/s) @ 0.01 torr
Operating Range	1.3 x 10-3 to 5 x 10-8 torr (1.7 x 10-3 to 6.5 x 10-8 mbar)
Maximum Forepressure	No Load: 0.65 torr (0.85 mbar) Full Load: 0.55 torr (0.72 mbar)
Recommended Backing Pump	ɛ100 cfm (170 m3/hr)
Backstreaming Rate, Standard Cold Cap	<1.5 x 10-3 mg/cm2/min
Warmup Time	45 minutes
Cooldown Time	85 minutes
Fluid Charge	5 quarts (4.7 liters)
Electrical Requirements	3 ph, 50/60 Hz, 240/415/480 VAC
Pump Power	12,000 watts
Cooling Water Requirements	1.5 gpm (300 l/hr) at 60-80°F (15-26°C)
Water Connections	1⁄4 in. FPT Tee
Recommended Fluid	DC-704

Ordering Information

Description Voltage            Weight kg (lbs)            Part Number
Flange Type
HS-20 Pump   ASA     ISO
HS-20 with standard
cold cap 415 V 264.0 (580.0)    84341326    L5922326
HS-20 with halo baffle 415 V              264.0 (580.0)    84341336    L5922336

Accessories Weight kg (lbs)                                    Part Number
Water-cooled halo baffle 11.0 (25.0)                                           K1855320
Centering ring for ISO
foreline flange, 160K 0.5 (1.0)                                              IC160SV
Quick cool coil – must be installed in the factory Factory Special
Installation and Operation Manual 699901140

Replacement Parts (six heaters required per pump)

Heater, 2000 W, 240 V/415 V
with leads 0.5 (1.0)                                               647320020
Heater, 2000 W, 480 V
with leads 0.5 (1.0)                                               647320030
Heater, 2000 W, 240 V/415 V
no leads – used on pumps
built before May ‘90 0.5 (1.0)                                               647320060
Heater, 2000 W, 480 V
no leads – used on pumps
built before May ‘90 0.5 (1.0)                                               647320070
Heater crush plate
(replace one with each
new heater) 0.5 (1.0)                                               K7108001
Heater clamping plate
(six required per pump) 4.0 (8.0)                                               K7107001
Heater insulator
(one required per pump) 0.5 (1.0)                                               L6514001
HS-16/20/Dalton heater wire,
10 AWG, 120 inches
(2 per heater required) 1.0 (0.4)                                               X3900-68000
Replacement o-ring kit for
ASA pumps (kit contains 1 inlet flange o-ring
(butyl 84349002), 0.5 (1.0)                                               K0377165
1 foreline flange o-ring (buna 2-432), sight glass o-ring and gasket, 8 fill and
drain o-rings (Viton 2-213)
Sight glass service kit
(pumps built before Oct. ’95) 1.5 (3.0)                                               F6097301
Upper (water) thermal switch
(set at 185 °F/85 °C) 0.5 (1.0)                                               K9050001
Lower (boiler) thermal switch
(set at 390 °F/199 °C) 0.5 (1.0)                                               K9050002
Cold cap gasket/grommet
(kit of 4) 0.5 (1.0)                                               L8839301
Cold cap nut and follower
(2 each) 0.5 (1.0)                                               L8840301

NOTE

• Inlet flange 20 in. ASA, foreline flange 4 in. ASA
• Inlet flange ISO 630K, foreline flange ISO 160K
• Not recommended for use with Santovac 5
• Pumps with ASA flanges include o-rings for inlet and foreline flanges
• Pumps with ISO flanges do not include centering rings required for foreline and inlet flanges

Five-stage fractionating jet purifies pumping fluid and assures low base pressure.
High tolerable forepressure.
Full thermal protection.
Fluid-level sight glass provides quick indication of pump fluid status at all times.
Fill and drain assembly for pump oil.
Standard gauge port (NW-25) below inlet flange included.
Foreline baffle prevents loss of fluid into backing pump system.
Optional halo baffle reduces backstreaming without adding height.
Ordering Details
Download HS-20 Diffusion Pump 3D Model

Specifications

Technical Specifications

Pumping Speed,Operating Range Pumping Speed, AVS 4.1 (1963)	10,000 l/s air, 12,500 l/s He and H2 17,500 l/s Air
Maximum Throughput	12.5 T-l/s (16.7 mbar l/s) in operating range, 18 T-l/s (23 mbar-l/s) @ 0.01 torr
Operating Range	1.3 x 10-3 to 5 x 10-8 torr (1.7 x 10-3 to 6.5 x 10-8 mbar)
Maximum Forepressure	No Load: 0.65 torr (0.85 mbar) Full Load: 0.55 torr (0.72 mbar)
Recommended Backing Pump	ɛ100 cfm (170 m3/hr)
Backstreaming Rate, Standard Cold Cap	<1.5 x 10-3 mg/cm2/min
Warmup Time	45 minutes
Cooldown Time	85 minutes
Fluid Charge	5 quarts (4.7 liters)
Electrical Requirements	3 ph, 50/60 Hz, 240/415/480 VAC
Pump Power	12,000 watts
Cooling Water Requirements	1.5 gpm (300 l/hr) at 60-80°F (15-26°C)
Water Connections	1⁄4 in. FPT Tee
Recommended Fluid	DC-704

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