Agilent / Varian Combination VacIon Plus PumpsTitanium Sublimation Pumps

Ion Pumps
Combination VacIon Plus Pumps/Titanium Sublimation Pumps


The VacIon Plus Combination Pumps integrate titanium sublimation pumping to achieve ultra-high vacuum. The Titanium Sublimation Pump (TSP) creates extra high pumping speed for getterable gases while the ion pump handles the non-getterable gases such as argon and methane. The TSP can be added to the ion pump, or used as a separate pumping unit.

Combination Pump configurations are available for the VacIon Plus 150, 300, or 500, and include the cylindrical cryopanel, an extra side or bottom-mounted 8 inch ConFlat flanged port, and a TSP source mounted to the extra port providing extra high water pumping speed.

Agilent offers two types of titanium sublimation pumps: filament and titanium ball sources. Filament-type TSP sources can be turned off between sublimations and thereby avoid thermally-induced outgassing. The ball-type sources contain larger amounts of titanium for longer life when operated under conditions that use more titanium, such as higher operating pressures.



Features

• Getterable gases enter the end of the cylindrical cryopanel and combine with the freshly-deposited titanium.
• Liquid nitrogen cooling the cryopanel increases the efficiency of the gettering process and adds greatly to the water pumping speed.
• The cryopanel may be mounted on the bottom of the pump or the side, providing flexibility when height restrictions are present.
• Customized pump configurations are also available.

Specifications

Features

Specifications

Getterable gases enter the end of the cylindrical cryopanel and combine with the freshly-deposited titanium. Liquid nitrogen cooling the cryopanel increases the efficiency of the gettering process and adds greatly to the water pumping speed. The cryopanel may be mounted on the bottom of the pump or the side, providing flexibility when height restrictions are present. Customized pump configurations are also available.

VacIon 150 Side Mounted TSP Outline Drawing X   VacIon 300 Side Mounted TSP Outline Drawing X   VacIon 500 Side Mounted TSP Outline Drawing X   VacIon 300 Bottom Mounted TSP Outline Drawing X   VacIon 500 Bottom Mounted TSP Outline Drawing X   Technical Specifications X   Pumping Speed Curve X

Titanium Sublimation Pumps (TSPs)	Features	Specifications
TSP Cartridge	The popular TSP cartridge is provided on a 2 ¾” OD ConFlat flange and contains three titanium-molybdenum filaments, each with 1.1 grams of usable titanium. The cartridge assembly is bakeable to 400 °C. Maximum sublimation is achieved at 300 watts of source power.	Outline Drawing X   Technical Specifications X
Mini Ti-Ball	The Mini Ti-Ball source provides 15.2 grams of usable titanium and is mounted on a 2 ¾” OD ConFlat flange. Maximum sublimation is achieved at 300 watts of source power, while the Standby power requirement is 100 watts.	Outline Drawing X   Technical Specifications X
TSP Cryopanel	Designed for use with the TSP cartridge source*, this sublimation cryopanel is mounted to an 8” OD ConFlat flange. It can operate with water cooling, liquid nitrogen, or uncooled if used at UHV. This cryopanel can be mounted to doubleended or side-ported ion pumps and can also be used independently in any 8” (NW 150) CFF port with 11 inch depth/clearance.	Outline Drawing X   Pumping Speed vs Pressure at different evaporation rates X   Technical Specifications X

Literature

Agilent 4UHV Ion Pump Controller Brochure

4UHV Ion Pump Controller overview: features and benefits, technical specifications, ordering information, frequently asked questions.
 

Agilent Ion Pumps Catalog

Catalog of Agilent Ion Pumps. Complete model listing with specifications, drawings, pictures, ordering information and applications.

Ion Pumps History

60 years of history - Agilent Ion Pumps: the invention that made UHV possible
 

Frequently Asked Questions (FAQs) Ion Pumps

Find the answers to frequently asked questions about Agilent’s ion pumps. FAQs about ion pump operation and best practices, ion pump controllers, titanium sublimation pumps (TSP).
 

VacIon Plus 500 Combination Pump User Manual

User Manual for VacIon Plus 500 Combination Pump

• User Manuals
• English
• 30 Jun 2017
• 1.68 MB
• PDF

VacIon Plus 300 Combination Pump User Manual

The VacIon Plus 300 Combination pump includes a VacIon Plus 300 ion pump, a cryopanel that can be bottom or laterally mounted, and a heater.

• User Manuals
• English
• 30 Jun 2017
• 1.67 MB
• PDF

VacIon Plus 150 Combination Pump User Manual

The VacIon Plus 150 Combination Pump includes a VacIon Plus 150 vacuum pump, a mounted cryopanel, and a heater.

• User Manuals
• English
• 30 Jun 2017
• 1.64 MB
• PDF

Cryopanel User Manual

Instructions for use and technical specifications for the Cryopanel

• User Manuals
• English
• 30 Jun 2017
• 1.99 MB
• PDF

Mini Ti-Ball Titanium Sublimation Source user manual

Instructions for use and technical specifications for the Mini Ti-Ball Titanium Sublimation Source

• User Manuals
• English
• 30 Jun 2017
• 1.54 MB
• PDF

Titanium Sublimation Cartridge user manual

Instructions for use and technical specifications for the Titanium Sublimation Cartridge

• User Manuals
• English
• 30 Jun 2017
• 1.60 MB
• PDF
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Order Information

Part Number	Description
9192541	Pump, Ion StarCell, for VacIon Plus 150, 150 L/s, with side-mounted cryopanel, TSP cartridge, installed heater 220 V
9192510	Pump, Ion Diode, for Vaclon Plus 150, 150 L/s, with side-mounted cryopanel, TSP cartridge, installed heater 120 V
9192511	Pump, Ion Diode, for VacIon Plus 150, 150 L/s, with side-mounted cryopanel, TSP cartridge, installed heater 220 V
9192540	Pump, Ion StarCell, for VacIon Plus 150, 150 L/s, with side-mounted cryopanel, TSP cartridge, installed heater 120 V
9192642	Pump, Ion StarCell, for VacIon Plus 300, 300 L/s, with bottom-mounted cryopanel, TSP cartridge, installed heater 120 V
9192643	Pump, Ion StarCell, for VacIon Plus 300, 300 L/s, with bottom-mounted cryopanel, TSP cartridge, installed heater 220 V
9192611	Pump, Ion Diode, for VacIon Plus 300, 300 L/s, with side-mounted cryopanel, TSP cartridge, installed heater 220 V
9160050	Titanium Sublimation Pump, filament cartridge source, 2.75 inch, ConFlat
9192613	Pump, Ion Diode, for VacIon Plus 300, 300 L/s, with bottom-mounted cryopanel, TSP cartridge, installed heater 220 V
9192612	Pump, Ion Diode, for VacIon Plus 300, 300 L/s, with bottom-mounted cryopanel, TSP cartridge, installed heater 120 V
9192610	Pump, Ion Diode, for VacIon Plus 300, 300 L/s, with side-mounted cryopanel, TSP cartridge, installed heater 120 V
9192641	Pump, Ion StarCell, for VacIon Plus 300, 300 L/s, with side-mounted cryopanel, TSP cartridge, installed heater 220 V
9192640	Pump, Ion StarCell, for VacIon Plus 300, 300 L/s, with side-mounted cryopanel, TSP cartridge, installed heater 120 V
9192713	Pump, Ion Diode, for VacIon Plus 500, 500 L/s, with bottom-mounted cryopanel, TSP cartridge, installed heater 220 V
9192712	Pump, Ion Diode, for VacIon Plus 500, 500 L/s, with bottom-mounted cryopanel, TSP cartridge, installed heater 120 V
9192711	Pump, Ion Diode, for VacIon Plus 500, 500 L/s, with side-mounted cryopanel, TSP cartridge, installed heater 220 V
9192710	Pump, Ion Diode, for VacIon Plus 500, 500 L/s, with side-mounted cryopanel, TSP cartridge, installed heater 120 V
9192743	Pump, Ion StarCell, for VacIon Plus 500, 500 L/s, with bottom-mounted cryopanel, TSP cartridge, installed heater 220 V
9192740	Pump, Ion StarCell, for VacIon Plus 500, 500 L/s, with side-mounted cryopanel, TSP cartridge, installed heater 120 V
9192742	Pump, Ion StarCell, for VacIon Plus 500, 500 L/s, with bottom-mounted cryopanel, TSP cartridge, installed heater 120 V
9192741	Pump, Ion StarCell, for VacIon Plus 500, 500 L/s, with side-mounted cryopanel, TSP cartridge, installed heater 220 V
9240730M017	TSP CARTRIDGE CABLE
9240730M015	TSP CARTRIDGE CABLE
9240730M013	TSP CABLE
9160051	Titanium Sublimation Pump, replacement filaments, 12/pk
9299011	Controller, Vaclon Ion Pumps, 4UHV, 200 W positive
9299010	Controller, Vaclon Ion Pumps, 4UHV, 200 W negative
9299201	Controller, Vaclon Ion Pumps, 4UHV, two channels, 80 W positive
9299200	Controller, Vaclon Ion Pumps, 4UHV, two channels, 80 W negative
9299211	Controller, Vaclon Ion Pumps, 4UHV, 2 x 80 W positive and 1 x 200 W positive channels
9299210	Controller, Vaclon Ion Pumps, 4UHV, 2 x 80 W negative and 1 x 200 W negative channels
9299021	Controller, Vaclon Ion Pumps, 4UHV, Two Channels, 200 W positive
9299020	Controller, Vaclon Ion Pumps, 4UHV, Two Channels, 200 W negative
9299213	Controller, Vaclon Ion Pumps, 4UHV, 2 x 80 W negative and 1 x 200 W positive channels
9299212	Controller, Vaclon Ion Pumps, 4UHV, 2 x 80 W positive and 1 x 200 W negative channels
9299400	Controller, Vaclon Ion Pumps, 4UHV, 4 x 80 W negative channels
9299401	Controller, Vaclon Ion Pumps, 4UHV, 4 x 80 W positive channels
9240730	Cable, high-voltage, titanium sublimation cartridge, 3.5 m
9160008	Replacement Mini Ti-Ball source
9299022	Controller, Vaclon Ion Pumps, 4UHV, 200 W negative and 200 W positive channels
9299402	Controller, Vaclon Ion Pumps, 4UHV, 2 x 80 W positive and 2 x 80 W negative channels
9240730M001	TSP CABLE
9190180	Titanium sublimation cryopanel, 8 inch, ConFlat flange

Ordering Information
 
Description                                                    Part Number                        Part Number
                                                                           4UHV                                4UHV
                                                                                                                  Fast Response
  
4UHV Controller 1x200W Negative                9299010                               9299010M1000
4UHV Controller 1x200W Positive                 9299011                                9299011M1000
4UHV Controller 2X80W Negative                 9299200                               9299200M1000
4UHV Controller 2X80W Positive                   9299201                               9299201M1000
4UHV Controller 2x200W Negative                9299020                               9299020M1000
4UHV Controller 2x200W Positive                 9299021                                9299021M1000
4UHV Controller 1x200W Positive
& 1x200W Negative                                      9299022                                9299022M1000
4UHV Controller 4X80W Negative                9299400                                9299400M1000
4UHV Controller 4X80W Positive                9299401                                9299401M1000
4UHV Controller 2x80W Positive
& 2x80W Negative                                        9299402                                9299402M1000
4UHV Controller 2x80W Negative
& 1X200W Negative                                     9299210                                9299210M1000
4UHV Controller 2x80W Positive
& 1x200W Positive                                       9299211                                9299211M1000
4UHV Controller 2x80W Positive
& 1x200W Negative                                     9299212                                9299212M1000
4UHV Controller 2x80W Negative
& 1X200W Positive                                      9299213                                9299213M1000
4UHV Controller 1x200W Negative,
 Ethernet                                                       7299010                                7299010M1000
4UHV Controller 1x200W Positive,
Ethernet                                                        7299011                                7299011M1000
4UHV Controller 2X80W Negative,
Ethernet                                                        7299200                                7299200M1000
4UHV Controller 2X80W Positive,
Ethernet                                                        7299201                                7299201M1000
4UHV Controller 2x200W Negative,
Ethernet                                                        7299020                                7299020M1000
4UHV Controller 2x200W Positive,
Ethernet                                                        7299021                                7299021M1000
4UHV Controller 1x200W Positive
& 1x200W Negative, Ethernet                      7299022                                7299022M1000
4UHV Controller 4X80W Negative,
Ethernet                                                        7299400                                7299400M1000
4UHV Controller 4X80W Positive,
Ethernet                                                        7299401                                7299401M1000
4UHV Controller 2x80W Positive
& 2x80W Negative, Ethernet                        7299402                                7299402M1000
4UHV Controller 2x80W Negative
& 1X200W Negative, Ethernet                      7299210                                7299210M1000
4UHV Controller 2x80W Positive
& 1x200W Positive, Ethernet                        7299211                                7299211M1000
4UHV Controller 2x80W Positive
& 1x200W Negative, Ethernet                      7299212                                7299212M1000
4UHV Controller 2x80W Negative
& 1X200W Positive, Ethernet                       7299213                                7299213M1000
4UHV Controller 1x200W Negative,
Profibus                                                        8299010                                8299010M1000
4UHV Controller 1x200W Positive,
Profibus                                                        8299011                                8299011M1000
4UHV Controller 2X80W Negative,
Profibus                                                        8299200                                8299200M1000
4UHV Controller 2X80W Positive,
Profibus                                                        8299201                                8299201M1000
4UHV Controller 2x200W Negative,
Profibus                                                        8299020                                8299020M1000
4UHV Controller 2x200W Positive,
Profibus                                                        8299021                                8299021M1000
4UHV Controller 1x200W Positive
& 1x200W Negative, Profibus                      8299022                                8299022M1000
4UHV Controller 4X80W Negative,
Profibus                                                        8299400                                8299400M1000
4UHV Controller 4X80W Positive,
Profibus                                                        8299401                                8299401M1000
4UHV Controller 2x80W Positive
& 2x80W Negative, Profibus                        8299402                                8299402M1000
4UHV Controller 2x80W Negative
& 1X200W Negative, Profibus                     8299210                                8299210M1000
4UHV Controller 2x80W Positive
& 1x200W Positive, Profibus                       8299211                                8299211M1000
4UHV Controller 2x80W Positive
& 1x200W Negative, Profibus                     8299212                                8299212M1000
4UHV Controller 2x80W Negative
& 1X200W Positive, Profibus                      8299213                                8299213M1000
 
Accessories and Cables*
 
HV bakeable cable, radiation resistant, 4 m (13 ft.), with Interlock               9290705
HV bakeable cable, radiation resistant, 7 m (23 ft.), with Interlock               9290707
HV bakeable cable, radiation resistant, 10 m (33 ft.), with Interlock             9290708
HV bakeable cable, radiation resistant, 20 m (66 ft.), with Interlock             9290709
Rack adapter 19”                                                                                          9290064
Mains cable NEMA Plug, 3 m (10 ft.)                                                            9699958
Mains cable European Plug, 3 m (10 ft.)                                                       9699957
(*) The unit does not include the power cable, please order the cable separately