FRG-700/702 Pirani Inverted Magnetron Gauge

The Agilent FRG-700 Gauge is a full range gauge that provides two measuring technologies in a single, compact and economical package to measure process and base pressure from 5 x 10-9 mbar to atmosphere (3.8 x 10-9 Torr to atmosphere). The single, compact unit with one logarithmic analog output signal, significantly reduces the complexity of installation, setup and integration. The benefits are reduced cost and a marked reduction in valuable space requirements. The FRG-702 is the all-metal version of the FRG-700, incorporating a metal-sealed feedthrough. It can be operated at higher temperatures (max. 150º C at flange) than the FRG-700 (max. 55º C at flange).


FRG702REPR	Repair Kit, FRG-702 Full Range Gauge
FRG702KF25	FRG-702 full range Pirani/inverted magnetron combination gauge, KF25, all metal, bakeable
FRG702CF35	FRG-702 full range Pirani/inverted magnetron combination gauge, DN40 2.75 inch ConFlat flange, all metal, bakeable
FRG702KF40	FRG-702 full Range Pirani/inverted magnetron gauge, KF40

Features

Provides 2 measuring technologies in a single, compact, economical package
Measures process and base pressure from 5 x 10-9 mbar to atmosphere (3.8 x 10-9 Torr to atmosphere)
A single, compact unit with one logarithmic analog output signal significantly reduces the complexity of installation, setup and integration
Ideal for high vacuum pressure monitoring, base pressure for evaporation and sputtering systems, and general vacuum measurement and control in the medium and high vacuum range
Wide measurement range from 5 x 10-9 mbar to atmosphere
No filament to burn out
Excellent ignition properties
Easy to clean

Specifications

Technical Specifications

FRG-700/702 Full-Range Gauge Tubes
Measurement range	5 x 10-9 to 1000 mbar (3.8 x 10-9 to 760 Torr)
Accuracy	± 30 % of reading, typical
Repeatability	± 5 % of reading, typical
Mounting orientation	Any
Admissible temperature (ambient)	Operation Storage	Bake-out*			(Pirani)		Filament Temperature
	5 to 55 °C	–40 to +65 °C			150 °C		120 °C
Supply voltage	At gauge		Ripple			Power consumption
	15 to 30 VDC		≤1 Vpp			≤2 W
Output signal (measurement signal)	Voltage range			Measurement range
	0 to 10.5 V			1.82 to 8.6 V
Voltage vs. pressure	0.6 V/decade, logarithmic
Error signal	<0.5 V (no supply), >9.5 V (Pirani sensor, filament rupture)
Minimum loaded impedance	10 kΩ, short-circuit proof
Response time	<10 ms (@ p> 10-6 mbar), ≈1000 ms (@ p= 10-8 mbar)
Identification gauge	85 kΩ, referenced to supply common
Status	Pirani-only mode		Combined Pirani/cold cathode mode			LED
	0 V (low)		15 V to 30 (high)			LED green high voltage on
Electrical connection	FCC 68 appliance connector, 8 poles, female
Sensor cable	8 poles plus shielding
Maximum cable length	≤ 50 m
Operating voltage/current	≤3.3 kV/≤500 A
Materials exposed to vacuum	SS, Al2O3, FPM75, Mo, Ni, Au, W
Internal volume	≈ 20 cm3
Weight	DN 25 ISO-KF ≈700g, DN 40 CF ≈980g
Standards	EN 61000-6-2, EN 61000-6-3, EN 61010-1

Outline Drawing
FRG-700 Series Pirani Inverted Magnetron Gauge Outline Drawing

Lebih maklumat tentang Hexo Industries (M) Sdn Bhd

Agilent / Varian FRG-700/702 Pirani Inverted Magnetron Gauge

FRG-700/702 Pirani Inverted Magnetron Gauge