Agilent / Varian Active Gauge Selection Chart

Agilent / Varian Active Gauge Selection Chart

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Active Gauge Selection Chart


Agilent Vacuum Active Gauges integrate the gauge and controller in a single, compact package. These are ideal for embedded OEM and industrial systems where a control computer or PLC handles the display/control functions for one or several gauges. The user provides input power (typically 24V) and reads pressure output via PC or PLC. A variety of set point interface features are available to automate your system.

Vacuum Range Gauge Type Gauge Characteristics
Rough Vacuum - Atmosphere to 10-mbar
  PVG-500 Micro Pirani Gauge
  • Compact, rugged aluminum housing that mounts in any orientation with a logarithmic signal output
  • Stainless steel sensor cell with metal-sealed feedthrough provides a rugged design for a wide range of applications
  • Push button ATM and High Vacuum (HV) adjustment is easy to set-up
  • Nickel filament option provides a solution for corrosive applications
  • Optional set points use pressure readings to trigger critical operations
  CDG-500 Capacitance Diaphragm Gauge
  • Full scale ranges from 1 to 1000 Torr with push button zeroing and optional set point control
  • Excellent long term signal stability and repeatability deliver long term performance comparable to heated versions
  • Fast recovery from atmospheric pressures and rapid stabilization after start-up reduces process cycle times
  • Corrosion resistant ceramic sensor with sensor shielding protection
  PCG-750 Pirani/Capacitance Diaphragm Gauge
  • High accuracy and reproducibility at atmosphere
  • Fast atmospheric detection shortens process cycle times
  • Gas-type independence above 10 mbar allows safe venting with any gas mixture
  • Compact, rugged housing that mounts in any orientation with a logarithmic signal output
  • Set point control uses pressure readings to trigger critical operations
  • Exchangeable plug and play sensor is easy to repair and lowers cost of ownership
  • Nickel filament option provides a solution for corrosive applications
  • Bright color LCD display option makes pressure easy to monitor
Full Range Gauges - Atmosphere to 10-10 mbar
  FRG-700/702 Pirani/Inverted Magnetron Gauges
  • Provides two measuring technologies in a single, compact, economical package
  • Measures process and base pressure from 5 x 10-9 mbar to atmosphere (3.8 x 10-9 Torr to atmosphere)
  • A single, compact unit with one logarithmic analog output signal significantly reduces complexity of installation, setup and integration
  • Ideal for high vacuum pressure monitoring, base pressure for evaporation and sputtering systems, and general vacuum measurement and control in the medium and high vacuum range
  • Wide measurement range from 5 x 10-9 mbar to atmosphere
  • No filament to burn out
  • Excellent ignition properties
  • Easy to clean
  FRG-720/730 Pirani/Bayard-Alpert Gauges
  • Combination gauge – Bayard-Alpert and Pirani provides a wide measurement range from 5 x 10-10 mbar to atmosphere
  • Long-life yttrium oxide coated iridium filament provides a rugged design for a wide range of applications
  • Pirani interlock protects Bayard-Alpert sensor from premature burnout and contamination effects from high pressure operation
  • Set point control uses pressure readings to trigger critical operations
  • LCD display option makes pressure easy to monitor
  • Profibus communication option allows easy network integration
 

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