All-Metal UHV Valves Series 54

Agilent is pleased to offer the all-metal UHV Series 54 valves in partnership with VAT, which are suitable for extreme, ultrahigh vacuum (UHV/XHV). They can be manually operated with a standard hex wrench, so no torque wrench is required.

Thanks to the 'hard-on-hard' metal seals, these valves can operate thousand of items before requiring maintenance. Flex vatring technology enables high sealing forces with comparably low axial forces. Any mounting orientation possible.


X3202-60097	Valve, all metal UHV, 0.75 inch, 1.33 inch ConFlat Flange	1 Each
X3202-60098	Valve, all metal UHV, right angle, 1.5 inch	1 Each
X3202-60107	Seal kit, first replacement, all-metal UHV valve series 54, 0.75 inch	1 Kit
X3202-60108	Seal kit, first replacement, all-metal UHV valve series 54, 1.5 inch	1 Kit
X3202-60109	Seal kit, second replacement, all-metal UHV valve series 54, 0.75 inch	1 Kit
X3202-60110	Seal kit, second replacement, all-metal UHV valve series 54, 1.5 inch	1 Kit

Features

Leak rate:
Differential pressure on the gate < 2 bar
Differential pressure at opening < 1 bar
Lifetime >1,000 cycles
Bakeout temperature < 300 °C
Material AISI 316L
Any mounting orientation
Conductance NW 16:5 L/s, NW 40: 50 l/sec
Convenient operation with a standard hexagon wrench—no torque wrench required
Sealing surfaces are only elastically deformed

Literature

Agilent Vacuum Valves

Features, benefits, technical specifications and ordering instructions for Agilent's extensive line of vacuum valves.

UHV All Metal Valves - Series 54

Data sheet for UHV All Metal Valves - Series 54

Agilent Valves by VAT UHV All Metal Valves Series 54 user manual

Instructions for use and technical specifications for the Agilent Valves by VAT UHV All Metal Valves Series 54

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