Vacuum Pumps

With respect to the final pressure different pumps are available:

• Single-step rotary piston pump for a max. final pressure of approx. 20 mbar.
• Two-step rotary piston pump for a max. final pressure of approx. 10-2 mbar.
• Pump system PT70 Dry (rotary vane pump with following turbomolecular pump for a max. final pressure of 10-5 mbar.

Information:
For protection of the vacuum pump only cold stage evacuation is allowed. The reduction of working tube strengthness limits the max. possible working temperature under vacuum.