Dry abatement system for treatment of hazardous substances such as arsenic and phosphorous without need for water scrubbing
| Model | Unit | GTE-3-0 | GTE-0-2 | GTC-1-0 | GTC-2-0 | GTC-6-0 | GTC-0-1 |
| Abatement method | Dry | Dry | Dry | Dry | Dry | Dry | |
| Gases | HBr, Cl2, BCl3, F2, SiF4, HF, COF2, C5F8, C4F6, etc. | NF3, N2O, NO, NO2, SiF4, HF, F2, etc. | SiH4, PH3, AsH3, TMS, etc. | NH3, SiH2Cl2, SiCl4, etc. | TEOS, TMB, TME, O3, etc. | ClF3, HF, F2, HCl, etc. | |
| Max. inflow gas volume | L/min | 100 | 80 | 100 | 100 | 100 | 100 |
| Dimension Single | W x D x H mm | 600x600x2,000 | 900x600x2,000 | 600x600x2,000 | 600x600x2,000 | 600x600x2,000 | 600x600x2,000 |
| Dual | W x D x H mm | 900x600x2,000 | - | 900x600x2,000 | 900x600x2,000 | 900x600x2,000 | 900x600x2,000 |
