Model No. |
EXYR60-A2PR-ND |
EXYR60-A2PL-ND |
|
Mechanical Spec. |
Table Size (mm) |
Ø 60 |
Ø 60 |
XY-Axis Travel Stroke (mm) |
± 7.5 |
± 7.5 |
|
θ-Axis Travel Stroke (°) |
± 8.5 |
± 8.5 |
|
Drive Type |
Ball screw |
Ball screw |
|
XY-Axis Rail |
Crossed-roller Guiding |
Crossed-roller Guiding |
|
θ-Axis Rail |
Crossed-roller Bearing |
Crossed-roller Bearing |
|
Stage Material / Surface Treatment |
Aluminum Alloy / Black anodized |
Aluminum Alloy / Black anodized |
|
Accuracy Level |
Precision grade |
Precision grade |
|
Motor Direction |
Right Wiring |
Left Wiring |
|
Precision Spec. |
XY-Axis Resolution (Pulse) (µm) |
5 (Full) / 2.5 (Half) |
5 (Full) / 2.5 (Half) |
XY-Axis Max. Speed (Full Step) (mm/sec) |
10 |
10 |
|
XY-Axis Positioning Precision (µm) |
10 |
10 |
|
XY-Axis Repeatability Precision (µm) |
± 1 |
± 1 |
|
XY-Axis Missed Step (µm) |
2 |
2 |
|
θ-Axis Resolution (Pulse) (°) |
0.0056 (Full) / 0.0028 (Half) |
0.0056 (Full) / 0.0028 (Half) |
|
θ-Axis Max. Speed (Full Step) (°/sec) |
8 |
8 |
|
θ-Axis Positioning Precision (°) |
0.05 |
0.05 |
|
θ-Axis Repeatability Precision (°) |
± 0.01 |
± 0.01 |
|
θ-Axis Missed Step (°) |
0.01 |
0.01 |
|
Parallelism (µm) |
20 |
20 |
|
Dynamic Straightness (µm) |
20 |
20 |
|
Dynamic Parallelism (µm) |
10 |
10 |
|
Load Capacity (Kgf) |
6 |
6 |
|
Electrical Spec. |
Motor Type |
2MS-N28D32A |
2MS-N28D32A |
Motor Brand |
GMT |
GMT |
|
Stage Side Connector |
15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS |
15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS |
|
Controller Side Connector |
15-Pin female end connetor D-SUB / 12-Pin female end connetor HRS (Additional options) |
15-Pin female end connetor D-SUB / 12-Pin female end connetor HRS (Additional options) |
|
Power Voltage |
24V ± 10% |
24V ± 10% |
|
Control Output |
NPN open collector output under 24V 8mA |
NPN open collector output under 24V 8mA |
|
Output Control |
Testing (sensing)output transistor OFF (closed) |
Testing (sensing)output transistor OFF (closed) |
System Configuration Diagram |
♦ For selection of the drivers preferred, please refer to the reference table or the catalogue of Motor0Driver. ♦ All of the drivers chosed are the specification of GMT preferred. For different needs, please choose the suitable drivers according to real functional needs. |
Axis Definition |
GMT has defined different axis as the following figuration according to the movement direction: Horizontal movement direction is X and Y axis. Vertical movement direction is Z axis. Movement around X, Y, Z axis is defined to α axis, β axis, and θ axis. Green arrows present the specified axis movement direction. |
Motor0driver Reference Table |
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