Comparison with our conventional 300mm semi-automatic UV irradiation system
- Footprint reduced by approximately 16.5%
- Operability improved by concentrating operation interfaces in one place
- Visibility improved by installing touch screen at an angle of 45 degrees (conforms to SEMI standard)
- Double irradiation of 150mm wafer ring frames (optional)
High precision irradiation with constant illuminance
Square-wave lighting utilizing a high frequency inverter offers high precision, reliable UV irradiation with optimized illuminance and light intensity.
Automatic feedback illuminance control
A built-in sensor enables feedback control to keep constant UV lighting output. By maintaining steady lighting throughout the lamp's life, the system contributes to fabrication of a constant quantity of semiconductors.
Easy operation with one button
This equipment improves operability and stability with center loading, while significantly stepping up operational efficiency.
