|
Resolution
|
In Z, relative to stylus tip: 0.38 µm (350 mm probe arm) / 0.19 µm (175 mm probe arm)
In Z, relative to measuring system: 0.04 µm |
|---|---|
|
Sampling angle
|
On smooth surfaces, depending on deflection: trailing edges up to 88°, leading edges up to 77°
|
|
Start of traversing length (in X)
|
0.2 mm
|
|
Tip radius
|
25 µm
|
|
Contacting speed (in Z)
|
0.1 to 1 mm/s
|
|
Probe arm length
|
175 mm, 350 mm
|
|
End of traversing length (in X)
|
120 mm
|
|
Positioning speed
|
In X and return speed: 0.2 to 8 mm/s
In Z: 0.2 to 10 mm/s |
|
Guide deviation
|
< 1 µm (over 120 mm)
|
|
Measuring speed
|
0.2 mm/s to 4 mm/s
|
|
Measuring range mm
|
(in Z) 50 mm
|
|
Traversing lengths
|
0.2 mm to 120 mm
|
|
Measuring force (N)
|
1 mN to 120 mN
|
Malaysia
