Overview:
The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr.
Based on the successful award winning IPX range, the modular EPX180 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX.
The EPX NE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring.
Features & Benefits:
Compact footprint – the EPX is more compact than the equivalent turbomolecular pump and primary pump combination.
Low cost of ownership – zero routine maintenance with a 5 year service interval.
Unique patent protected pumping mechanism – the EPX can pump down from atmosphere to turbomolecular base pressure and can operate continuously at all inlet pressures. No separate “rough pumping” required.
Ultra clean mechanism – EPX pumps have no grease or oil under vacuum and present no other source of potential contamination.
Extremely reliable – based on field proven IPX technology, the EPX has a MTBFp = 13 years (SEMI E10) with service periods of around every 5 years to maximize the life of the pump.
Water cooled – low environmental heat load
Low noise and vibration – better working environment. Ideal for vibration sensitive environments.
Technical Data:
Peak speed | 170 m3h-1 |
105 ft3min-1 | |
2835 lmin-1 | |
Ultimate vacuum | |
<1 x 10-4 mbar | |
<7.5 x 10-5 Torr | |
<1 x 10-2 Pa | |
Warm-up time (to nominal performance) | 30 min |
Inlet flange | ISO63 |
Outlet flange | NW25 |
Noise | <59 dB(A) |
Minimum cooling water flow rate | 2 lmin-1 |
Cooling water temperature | 15 – 35 °C |
Nitrogen supply interface | 1/4 in (6.5 mm) tube |
Nitrogen supply pressure | 3 x 105 – 7 x 105 pa |
Minimum nitrogen purity | 99.95% |
Electrical Supply | 400 V, 50/60 Hz 3 phase |
Power at ultimate | 1.4 kW |
Rated motor power | 3.0 kW |
TIM | None |
Weight | 43.5 kg |