Overview:
The GX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.
GX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure GX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.
Features & Benefits:
Performance | |
Peak speed | 620 m3h-1 |
365 ft3min-1 | |
10333 lmin-1 | |
Ultimate pressure | 7 x 10 -4 mbar |
5.25 x 10-4 Torr | |
0.07 Pa | |
Power at 700 Torr exhaust | |
Ultimate | 1.6 kW |
AUC (Active Utility Controller) | 0.05 kW |
Water * | |
Water inlet | 2 slm |
Nitrogen | 0 slm |
Installation Details | |
Footprint (excluding exhaust) | 0.20 m2 |
Weight | 220 kg |
Inlet connection | ISO 100 |
Outlet connection | NW25 |
Noise at ultimate | <55 dB(A) |