Overview:
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.
The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
Features & Benefits:
Peak Speed | 103 m3h-1 |
61 cfm | |
1717 l min-1 | |
Ultimate Vacuum | 1 x 10-2 mbar |
7.5 x 10-3 Torr | |
1 Pa | |
Typical shaft seal nitrogen flow | 4 slm |
Inlet Connection | ISO63 |
Outlet Connection | NW40 |
Typical cooling water flow at 15 psi pressure drop | 120 l h-1 |
2 l min-1 | |
Weight | 240 kg |
Power input at ultimate | 2.7 kW |
Rated motor power | 3.5 kW |
Oil Capacity | 0.7 l |