iXH Dry Vacuum Pump System

Overview:

The iXH family of dry pump products is an evolution of Edwards’ market-leading iH products and sets new standards for harsh process capability delivering low cost of ownership through process reliability in many of the worlds 300mm semiconductor and flat panel fabs.

The perfect range of high capacity dry pumps and boosters that can meet the ever increasing gas flow requirements encountered in the FPD, solar, semiconductor and LED manufacturing industries. A well as high peak pumping speed these pumps are equipped with features to ensure maximum reliability on harsh processes.  

With a modular design, iXH pumps meet today’s process requirements and have road-mapped responses to emerging application challenges in leading edge fabs.

Target applications for Semiconductor include:

• PECVD
• High-K
• Low-K
• SACVD
• LPCVD
• ALD
• EPI

Target applications for FPD include:

• PECVD
• TCO
• Etch
• Transfer Chambers

• Greatly Increased Hydrogen Pumping Speeds for advanced EPI and solar processes.
• High capacity dry pumps and boosters give an Expanded Process Window to enhance yields.
• Smaller Footprint and Lower Height for ease of fitting in any fab.
• Complies with Key International Standards including UL, CE and S2. Either use consistently or leave out.