Compression ratio N2/H2 |
>108 / 2 x 103 |
Ultimate pressure |
10-7 Pa (10-9 Torr) |
Allowable backing pressure |
266 Pa (2 Torr) |
Max gas flow N2 *(water cooled only) |
4000 sccm |
|
(6.76 Pam3s-1) |
Max gas flow Ar * (water cooled only) |
2100 sccm |
|
(3.55 Pam3s-1) |
Rated speed |
27700 rpm |
Starting time |
<10 minutes |
Mounting position |
Any orientation |
Input voltage |
200-240 V |
Max input power without TMS |
1500 VA |
Max input power with TMS |
1800 VA |
* The maximum gas flow is applicable under conditions that N
2 or Ar gas is pumped continuously with water cooling temperature under 25º C and the backing pump (10,000 l/min size) is used. It is changed on condition