Description
Overview:
The STP-iX455 turbo-molecular pump features an innovative, magnetic bearing and motor drive system, providing a 50% reduction in vibration compared to previous generation turbo pumps. An integrated controller eliminates the need for a conventional, rack-mounted controller and interconnecting cables, and does not require water cooling.
The pump features 450 ls-1 pumping speed for nitrogen. The STP-iX455 is an excellent fit for electron microscope, metrology, lithography and other vibration sensitive applications.
Features & Benefits:
-
Compact Design including a fully integrated controller
-
Inovative, Self-Sensing magnetic bearing system
-
Digital 5-axis control
-
Vibration levels reduced by 50% compared to the existing turbo pumps
-
Can be configured to run corrosive processes
-
Automatic Balancing System (ABS) standard
-
Automatic Vibration Reduction (AVR) standard
-
UL Listed, CE marked and SEMI® S2 compliant
Technical Data:
|
Inlet flange |
ISO100K/DN100CF |
ISO160K/DN160CF |
|
Pumping Speed |
|
|
|
N2 |
300 ls-1 |
450 ls-1 |
|
H2 |
300 ls-1 |
460 ls-1 |
|
Compression ratio |
|
|
|
N2 |
>108 |
>108 |
|
H2 |
>1 x 104 |
>1 x 104 |
|
Ultimate pressure |
6.5x10-6 (5x10-8) |
10-8 (10-10) |
|
Weight |
15 kg |
16 kg |
|
Max working pressure |
1.3 x 10-1 Pa |
|
Allowable backing pressure |
67 Pa |
|
Rated speed |
55000 rpm |
|
Starting time |
<6 min |
|
Mounting position |
Any orientation |
|
Cooling method |
Natural cooling (Air cooling fan when baking or gas pumping) |
|
Lubricating oil |
Not necessary |
|
Backing pump |
240 lmin-1 |
|
Leakage Magnetic Flux |
|
|
Axial direction |
<100 m/Gauss |
|
Radial direction |
<100 m/Gauss |
|
Ambient temperature range |
0 to 40 °C |
|
Storage temperature range |
-25 to 55 °C |
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Malaysia
