Overview:
STP-iXR2206 series magnetically levitated turbo-molecular pump provides industry-leading performance and incorporates latest technology small power supply into the on-board control which is the same concept with STP-iXA2206/iXA3306 series. The pumping performance is improved by the newest developed revolutionary rotor design. This fully integrated product offers easy installation and small footprint as an all-in-one solution for all application tools.
Features & Benefits:
| Inlet flange | VG200/ ISO200F/ ICF253 | VG250/ISO250F/ ICF305 |
| Backing port size | KF40 | KF40 |
| Pumping Speed | ||
| N2 | 1850 ls-1 | 2200 ls-1 |
| H2 | 1250 ls-1 | 1350 ls-1 |
| Ar | 1650 ls-1 | 2000 ls-1 |
| Compression ratio | ||
| N2 | >108 | >108 |
| H2 | 1 x 103 | 1 x 103 |
| Ultimate pressure | 10-7 Pa (10-9 Torr) | 10-7 Pa (10-9 Torr) |
| Max working pressure | ||
| Allowable backing pressure | 266 Pa (2 Torr) | |
| Rated speed | 36,500 rpm | |
| Run-up time to 90% rated speed | ||
| Starting time | ≦10 min | |
| Mounting position | Any orientation | |
| Cooling method | Water cooling | |
| Lubricating oil | Not necessary | |
| Backing pump | - | |
| Leakage Magnetic Flux | ||
| Axial direction | - | |
| Radial direction | - | |
| Ambient temperature range | 0 to 40 °C | |
| Storage temperature range | -5 to 55 °C | |
| Input voltage | 200 to 240 V a.c. | |
| Maximum input power | 750 VA | |
| Weight | 48 kg | |
Malaysia
