Plasma Cleaner (Parallel Electrode, Compact) (PiPi)

Plasma Cleaner (Parallel Electrode, Compact) (PiPi)

Category: PiPi Available
For more information, visit our official website at renetech.com.my

Description

Small and compact, suitable for R&D purposes
 
Features of Plasma Cleaner (Parallel Electrode, Compact) (PiPi)
Specifications
Item Code 00
Model PiPi
Model PiPi
Plasma mode RIE (reactive ion etching)
Electrode structure Parallel flat panel type
Electrode dimensions W130×D130mm
Internal dmensions W230×D130×H100mm
External dimensions W438×D520×H565mm
Power source (50/60Hz) AC115V/AC220V Single phase with step-down transformer
Vacuum meter Bourdon gauge
Controller Sequencer
Operation/display unit 4.5-inch monochrome STN touch panel
High-frequency out-put power 50-200W
Reference oscillator Quarts oscillator
Oscillation frequency 13.56MHz
Output setting Manual setting knob
Matching method Auto tuning
Purge gas N2 1/4-inch bite type tube fitting
Reaction gas Ar mass flow meter 1/4-inch bite type tube fitting
Internal dimensions(W×D×H mm) 230×130×100mm
External dimensions(W×D×H mm) 438×520×565mm
Power Source 115V
/220V Single phase with step-down transformer
Weight 50kg
 
Maintenance and warranty
Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.

More detail about Renetech Sdn Bhd
Renetech Sdn Bhd
Renetech Sdn Bhd Lab Equipment Selangor, Rotary Evaporator Supply Kuala Lumpur (KL), Laboratory Washer Supplier Malaysia ~ Renetech Sdn Bhd
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