The INFICON Pirani Standard Gauges, PSG500, PSG502-S, PSG510-S and PSG512-S, employ the most advanced digital Pirani technology available in themarketplace.
The rugged stainless steel sensor cell and compact design qualifythem for use on semiconductor systems and for standard applications, such as fore vacuum lines.
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | ±15% |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | ±50% |
| 100 … 1000 mbar | % of reading | ±50% |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | none |
| Setting range | mbar | |
| Hysteresis | % of reading | |
| Relay contact | ||
| Relay contact: Switching time | ms | |
| Materials exposed to vacuum | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 |
Malaysia
