Integrated Dry Vacuum Pump, Gas Abatement Systems

Integrated Dry Vacuum Pump, Gas Abatement Systems

Category: Gas Abatement Systems Available
For more information, visit our official website at ebara-pg.com

Description

Enables optimization of chamber exhaust/exhaust gas abatement process, reduces integration and management costs


Features and Benefits

Integrated dry vacuum pump/exhaust abatement systems. We will propose a system that will maximize production efficiency for our customers. Incorporating dry vacuum pumps into an exhaust abatement system with the ideal configuration for the requirements will reduce the burden of equipment installation. Batch operation and management is possible as an integrated exhaust system, achieving highly efficient processes.

More detail about EBARA PRECISION MACHINERY MALAYSIA SDN. BHD.
EBARA PRECISION MACHINERY MALAYSIA SDN. BHD.
EBARA PRECISION MACHINERY MALAYSIA SDN. BHD. Semiconductor Manufacturing Equipment Malaysia, Dry Vacuum Pump Supplier Penang, Chemical Mechanical Polishing System ~ EBARA PRECISION MACHINERY MALAYSIA SDN. BHD.
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