Model FDS

Category: Gas Abatement Systems Available
For more information, visit our official website at ebara-pg.com

Description

Dry exhaust abatement system for highly efficient and safe treatment of PFC gases with no need for water scrubbing


Features and Benefits

Model FDS is a dry exhaust abatement system that enables highly efficient and safe treatment of PFC gases with no need for water scrubbing. Capable of highly efficient treatment of at least 99.9% of PFC gases, and with the dry solidification of fluorine series gases after decomposition, no wastewater is generated and there is no need for treatment of toxic wastewater. Dual-cylinder types offer PFC removal efficiency of 99% or more at a maximum gas inflow rate of 250 L/min (in case of 250-L/min dual-cylinder type) and major improvements in system up time due to reactor vessel serial flow design, while a single-cylinder type enables easy replacement of existing dry exhaust abatement systems. Ideal for research laboratories that do not have wastewater treatment equipment or fuel lines.

Specifications

 
Model Unit FDS100S FDS250
Abatement method Dry Dry
Reactors 1 2
Reactor life detector Standard: Load cell
Option: PFC detector
Standard: PFC detector
Max. inflow gas volume L/min 100L/min 250L/min
Dimensions W x D x H mm 600×600×2,000mm 1,605×1,000×2,507
Agent life L/本 CF4: 3,000 CF4: 10,000
Gases CF4, C2F6, C3F6, CHF3, SF6, C5F8, C4F6, NF3, etc. CF4, C2F6, C3F6, CHF3, SF6, C5F8, C4F6, NF3, etc.

More detail about EBARA PRECISION MACHINERY MALAYSIA SDN. BHD.
EBARA PRECISION MACHINERY MALAYSIA SDN. BHD.
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