Dry exhaust abatement system for highly efficient and safe treatment of PFC gases with no need for water scrubbing
Model | Unit | FDS100S | FDS250 |
Abatement method | Dry | Dry | |
Reactors | 1 | 2 | |
Reactor life detector | Standard: Load cell Option: PFC detector |
Standard: PFC detector | |
Max. inflow gas volume | L/min | 100L/min | 250L/min |
Dimensions | W x D x H mm | 600×600×2,000mm | 1,605×1,000×2,507 |
Agent life | L/本 | CF4: 3,000 | CF4: 10,000 |
Gases | CF4, C2F6, C3F6, CHF3, SF6, C5F8, C4F6, NF3, etc. | CF4, C2F6, C3F6, CHF3, SF6, C5F8, C4F6, NF3, etc. |