Model G6: Top Choice in Malaysia, Penang EBARA PRECISION MACHINERY MALAYSIA SDN. BHD.

Description

Combustion-type exhaust abatement system for large flow volumes of up to 1,200 L/min

Combustion-type exhaust abatement systems
Capable of processing large volumes of inflow gases
Batch treatment of multiple gas types
Highly efficient abatement of PFCs
Byproduct removal measures/automatic removal of powdery byproducts
Low running cost
On-demand operation to suit gas type and volume
Greater ease of maintenance

Features and Benefits

Model G6 is a combustion-type exhaust abatement system that is capable of highly efficient, large-volume treatment of various types of gasses. Inflow gas volume is three times larger than conventional models. Suited to the treatment of large flows of high-heat-generating hydrogen gas. Reduction of running costs achieved through on-demand operation with variable fuel volume to suit the type and volume of gas being abated. Byproduct countermeasures, such as large-capacity byproduct traps, achieve reductions in maintenance costs and load in the abatement of high flow-rate gases. Ideal for applications in the manufacturing operations of electric components such as semiconductors, LCD panels, solar cells, and LEDs, chemicals and materials manufacture, and research laboratories.

Specifications

Model	Unit	G6 A1~A4	G6 P1~P4
Abatement method		burn+ wet	burn+ wet
Max. inflow gas volume	L/min	1,200 x 1,900 x 2,300	1,200 x 1,900 x 2,300
Fuel		City gas	Propane gas
Dimensions	W x D x H mm	1,200 x 1,900 x 2,300	1,200 x 1,900 x 2,300
Gases (e.g.)		Process (depo) gases SiH4, PH3, GeH4, AsH3, NH3, SiH2Cl2, B2H6, H2, PH3, Si3H8, etc. Cleaning gases - all types NF3, ClF3, HF, F2, HCl, COF2, etc. Etching gases – all types HBr, Cl2, SiCl4, BCl3, CO, C5F8, C4F6, etc.	Process (depo) gases SiH4, PH3, GeH4, AsH3, NH3, SiH2Cl2, B2H6, H2, PH3, Si3H8, etc. Cleaning gases - all types NF3, ClF3, HF, F2, HCl, COF2, etc. Etching gases – all types HBr, Cl2, SiCl4, BCl3, CO, C5F8, C4F6, etc.
Standard equipment		Large flow-rate NF3 abatement burner	Large flow-rate NF3 abatement burner

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