Model G6-E

Category: Gas Abatement Systems Available
For more information, visit our official website at ebara-pg.com

Description

Combustion-type exhaust abatement system capable of simultaneous abatement of large volumes of hydrogen and chlorine gas


Features and Benefits

Model G6-E is a combustion-type exhaust abatement system suited to the treatment of large volumes of gases containing hydrogen and chlorine used for epitaxial growth and other systems in processes to manufacture semiconductors. With a compact design, it is able to treat hydrogen at up to 200 L/min. Capable of treating chlorine gas and hydrogen gas simultaneously. Byproduct removal function installed as standard, reducing maintenance costs and load.

Specifications

 
Model Unit G6-E A1~A4 G6-E P1~P4
Abatement method burn+ wet burn+ wet
Max. inflow gas volume L/min 400 400
Fuel City gas Propane gas
Dimensions W x D x H mm 1,200×650×1,900mm 1,200×650×1,900mm
H abatement L/min 200 200
Gases (e.g.) Process (depo) gases
H2, PH3, Si3H8, SiH4, PH3, GeH4, AsH3, NH3, SiH2Cl2, B2H6, etc.
Cleaning gases - all types
NF3, ClF3, HF, F2, HCl, COF2, etc.
Etching gases – all types
HBr, Cl2, SiCl4, BCl3, CO, C5F8, C4F6, etc.
Process (depo) gases
H2, PH3, Si3H8, SiH4, PH3, GeH4, AsH3, NH3, SiH2Cl2, B2H6, etc.
Cleaning gases - all types
NF3, ClF3, HF, F2, HCl, COF2, etc.
Etching gases – all types
HBr, Cl2, SiCl4, BCl3, CO, C5F8, C4F6, etc.
Standard equipment Large flow-rate H2 abatement burner Large flow-rate H2 abatement burner
Burner scraper for powder removal Burner scraper for powder removal
Options City water/drainage consumption reduction unit City water/drainage consumption reduction unit
Fan scrubber for reduction of powder emissions Fan scrubber for reduction of powder emissions

More detail about EBARA PRECISION MACHINERY MALAYSIA SDN. BHD.
EBARA PRECISION MACHINERY MALAYSIA SDN. BHD.
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