Highly efficient, energy-saving catalysis-type exhaust abatement system
Model | Unit | GCR120* | GCR250 |
Abatement method | catalytic + wet | catalytic + wet | |
Max. inflow gas volume | L/min | 120 | 250 |
Reactor life detector | PFC detector | PFC detector | |
Dimensions | W x D x H mm | 1,200×600×1,800mm | 1,400×700×1,850mm |
Gases | CF4, C2F6, C3F8, CHF3, SF6, C5F8, C4F6, NF3, HF, F2, SiF4, CO, COF2, N2O, etc. | CF4, C2F6, C3F8, CHF3, SF6, C5F8, C4F6, NF3, HF, F2, SiF4, CO, COF2, N2O, etc. | |
*Discontinued products |