Model GCR

Category: Gas Abatement Systems Available
For more information, visit our official website at ebara-pg.com

Description

Highly efficient, energy-saving catalysis-type exhaust abatement system


Features and Benefits

Model GCR is a catalysis-type exhaust abatement system that efficiently decomposes and removes gases, including PFC gases such as CF4 used for etching oxide semiconductor films, at low running costs.


Specifications

 
Model Unit GCR120* GCR250
Abatement method catalytic + wet catalytic + wet
Max. inflow gas volume L/min 120 250
Reactor life detector PFC detector PFC detector
Dimensions W x D x H mm 1,200×600×1,800mm 1,400×700×1,850mm
Gases CF4, C2F6, C3F8, CHF3, SF6, C5F8, C4F6, NF3, HF, F2, SiF4, CO, COF2, N2O, etc. CF4, C2F6, C3F8, CHF3, SF6, C5F8, C4F6, NF3, HF, F2, SiF4, CO, COF2, N2O, etc.
*Discontinued products

More detail about EBARA PRECISION MACHINERY MALAYSIA SDN. BHD.
EBARA PRECISION MACHINERY MALAYSIA SDN. BHD.
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