Model GT

Category: Gas Abatement Systems Available
For more information, visit our official website at ebara-pg.com

Description

Dry abatement system for treatment of hazardous substances such as arsenic and phosphorous without need for water scrubbing


Features and Benefits

The most suitable adsorbent can be selected for each target process gas, making it suitable for a wide range of applications.

Specifications

 
Model Unit GTE-3-0 GTE-0-2 GTC-1-0 GTC-2-0 GTC-6-0 GTC-0-1
Abatement method Dry Dry Dry Dry Dry Dry
Gases HBr, Cl2, BCl3, F2, SiF4, HF, COF2, C5F8, C4F6, etc. NF3, N2O, NO, NO2, SiF4, HF, F2, etc. SiH4, PH3, AsH3, TMS, etc. NH3, SiH2Cl2, SiCl4, etc. TEOS, TMB, TME, O3, etc. ClF3, HF, F2, HCl, etc.
Max. inflow gas volume L/min 100 80 100 100 100 100
Dimension Single W x D x H mm 600x600x2,000 900x600x2,000 600x600x2,000 600x600x2,000 600x600x2,000 600x600x2,000
Dual W x D x H mm 900x600x2,000 - 900x600x2,000 900x600x2,000 900x600x2,000 900x600x2,000

More detail about EBARA PRECISION MACHINERY MALAYSIA SDN. BHD.
EBARA PRECISION MACHINERY MALAYSIA SDN. BHD.
EBARA PRECISION MACHINERY MALAYSIA SDN. BHD. Semiconductor Manufacturing Equipment Malaysia, Dry Vacuum Pump Supplier Penang, Chemical Mechanical Polishing System ~ EBARA PRECISION MACHINERY MALAYSIA SDN. BHD.
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