Dry Vacuum Pumps
Model ESA
Model ESA

 

Model ESA

EBARA PRECISION MACHINERY MALAYSIA SDN. BHD. flag
Category: Dry Vacuum Pumps Available
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Description

Dry vacuum pump suitable for pumping light gases such as hydrogen. Ideal design for fast pump-down requirements in large volume chambers.


Features and Benefits

The Model ESA product lineup includes models with pumping speeds ranging from 1,400 to 10,000 L/min, suited for pumping light gases such as hydrogen, and models with exhaust speeds from 20,000 to 80,000 L/min, for fast pumping in large volume chambers. The light-gas application models with pumping speeds of 10,000 L/min and below offer a small footprint and enhanced corrosion resistance options, which are ideal for large-volume light-gas pumping applications such as MO-CVD. The larger models achieve quiet, low-vibration operation, with optional exhaust configurations for organic solvent applications. They are ideal for LCD spatter devices, vacuum drying processes, and large load-lock applications.


Specifications
 
Model Unit ESA15-D ESA25-D ESA25XW ESA70W(-D) ESA70WN(-D) ESA80W-HDF ESA80WN-HDF ESA100W ESA100WN ESA200W ESA300W ESA500W ESA700W
Pumping Speed L/min 1,400 (50Hz) 2,500 (50Hz) 5,000 (50Hz) 7,000 (50Hz) 7,000 (50Hz) 8,400 (50Hz/60Hz) 8,400 (50Hz/60Hz) 10,000 (50Hz/60Hz) 10,000 (50Hz/60Hz) 20,000 (50Hz/60Hz) 28,000 (50Hz) 47,000 (50Hz) 80,000 (50Hz/60Hz)
1,700 (60Hz) 3,000 (60Hz) 6,000 (60Hz) 8,400 (60Hz) 8,400 (60Hz) 30,000 (60Hz) 50,000 (60Hz)
Ultimate Pressure Pa 400 (50Hz) 5.3 (50Hz) 5.3 (50Hz) 0.27 (50Hz) 0.4 (50Hz) 0.13 0.27 0.13 0.27 0.53 0.53 0.53 0.5
270 (60Hz) 4.0 (60Hz) 4.0 (60Hz) 0.13 (60Hz) 0.27 (60Hz)
Connection Inlet   NW40 NW50 ISO80 NW50 NW50 NW50 NW50 NW50 NW50 NW80 ISO100 ISO160 ISO160
Outlet   NW40 NW40 NW40 NW40 NW40 NW40 NW40 NW40 NW40 NW40 NW40 NW40 NW50
Approx. Power at Ultimate Pressure kW 2.9 (50Hz) 2.6 (50Hz) 5.2 (50Hz) 3.6 (50Hz) 3.6 (50Hz) 4.2 4.2 4.9 4.9 3.2 (50Hz) 6.6 (50Hz) 5.1 (50Hz) 7.4
3.2 (60Hz) 2.9 (60Hz) 5.8 (60Hz) 4.0 (60Hz) 4.0 (60Hz) 3.4 (60Hz) 7.3 (60Hz) 6.7 (60Hz)
Cooling water Flow rate L/min 3.5~8 3.5~8 7~16 3.5~8 3.5~8 3.5~8 3.5~8 3.5~8 3.5~8 3.5~8 6~9 6~9 6~9
Temperature ℃ Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30 Max. 30
N2 Flow rate Pa•m3/s 14~17 (4.6) 17~20 (3.8) 34~40 24~27 (4.7) 24~27 (4.7) 54~57 54~57 54~57 54~45 17~20 (3.8) 7.5~10.5 8.5~11 8.5~11
Power Supply
Phase/Volt/Freq.		 200V Models   3-phase/200V/50Hz
3-phase/200-220V/60Hz		 3-phase/200V/50Hz
3-phase/200-220V/60Hz		 3-phase/200V/50Hz
3-phase/200-220V/60Hz		 3-phase/200V/50Hz
3-phase/200-220V/60Hz		 3-phase/200V/50Hz
3-phase/200-220V/60Hz		 3-phase/200V/50Hz
3-phase/200-220V/60Hz		 3-phase/200V/50Hz
3-phase/200-220V/60Hz		 3-phase/200V/50Hz
3-phase/200-220V/60Hz		 3-phase/200V/50Hz
3-phase/200-220V/60Hz		 3-phase/200V/50Hz
3-phase/200-220V/60Hz		 3-phase/200V/50Hz
3-phase/200-220V/60Hz		 3-phase/200V/50Hz
3-phase/200-220V/60Hz		 3-phase/200V/50Hz
3-phase/200-220V/60Hz
400V Models   3-phase/380-400V/50Hz
3-phase/380-440V/60Hz		 3-phase/380-400V/50Hz
3-phase/380-440V/60Hz		 3-phase/380-400V/50Hz
3-phase/380-440V/60Hz		 3-phase/380-400V/50Hz
3-phase/380-440V/60Hz		 3-phase/380-400V/50Hz
3-phase/380-440V/60Hz		 3-phase/380-400V/50Hz
3-phase/380-440V/60Hz		 3-phase/380-400V/50Hz
3-phase/380-440V/60Hz		 3-phase/380-400V/50Hz
3-phase/380-440V/60Hz		 3-phase/380-400V/50Hz
3-phase/380-440V/60Hz		 3-phase/380-400V/50Hz
3-phase/380-440V/60Hz		 3-phase/380-400V/50Hz
3-phase/380-440V/60Hz		 3-phase/380-400V/50Hz
3-phase/380-440V/60Hz		 -
460V Models                       3-phase/440V/50Hz
3-phase/440-480V/60Hz		 3-phase/440V/50Hz
3-phase/440-480V/60Hz		 3-phase/440V/50Hz
3-phase/440-480V/60Hz
Power capacity kVA 6.4 6.4 12.8 10.3 10.3 12.6 12.6 12.6 12.6 12.0 23.7 41.3 46.5
Weight kg 240 240 480 380 380 400 400 400 400 410 700 750 1200

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