Model ESR

Model ESR

Category: Dry Vacuum Pumps Available
For more information, visit our official website at ebara-pg.com

Description

Dry vacuum pump with low power consumption, suitable for corrosive process applications


Features and Benefits

With EBARA’s unique rotor design and idling function, the Model ESR range achieves low power consumption and a small footprint. Helps to reduce running costs. With enhanced corrosion resistance options available, this model offers a wide range of applications from light-load processes such as load-lock and SEM to corrosive processes.


Specifications

 
Model Unit ESR20N ESR30 ESR30N ESR500W(N)
Pumping Speed L/min 1,300 ~ 2,000 3,000 3,000 46,000
Ultimate Pressure Pa 2.0 0.53 0.67 0.2
Connection Inlet   NW40 NW50 NW50 ISO160
Outlet   NW40 NW40 NW40 NW40
Approx. Power at Ultimate Pressure kW 0.7 1.7 1.7 3.1
Cooling water Flow rate L/min 2~8 3.5~8 3.5~8 3.5~8
Temperature Max. 30 Max. 30 Max. 30 Max. 30
N2 Flow rate Pa•m3/s 19~22 (0) 19~22 (3.4) 19~22 (3.4) 19~22 (3.4)
Power Supply
Phase/Volt/Freq.
200V Models   3-phase/200V/50Hz
3-phase/200-220V/60Hz
3-phase/200V/50Hz
3-phase/200-220V/60Hz
3-phase/200V/50Hz
3-phase/200-220V/60Hz
3-phase/200V/50Hz
3-phase/200-220V/60Hz
400V Models   3-phase/380-400V/50Hz
3-phase/380-440V/60Hz
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz
3-phase/380-400V/50Hz
3-phase/380-440V/60Hz
Power capacity kVA 4.0 7.0 7.0 12.3
Weight kg 90 190 190 500

More detail about EBARA PRECISION MACHINERY MALAYSIA SDN. BHD.
EBARA PRECISION MACHINERY MALAYSIA SDN. BHD.
EBARA PRECISION MACHINERY MALAYSIA SDN. BHD. Semiconductor Manufacturing Equipment Malaysia, Dry Vacuum Pump Supplier Penang, Chemical Mechanical Polishing System ~ EBARA PRECISION MACHINERY MALAYSIA SDN. BHD.
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