Dry vacuum pump suitable for handling reaction byproducts and for fast pump-down requirements in large-volume chambers
Model | Unit | EST10N | EST25N | EST100WN | EST200WN | EST300WN | EST500WN | EST800WN | |
Pumping Speed | L/min | 1,000 | 2,500 | 10,000 | 20,000 | 30,000 | 50,000 | 80,000 | |
Ultimate Pressure | Pa | 2.7 | 0.4 | 0.4 | 0.4 | 0.4 | 0.4 | 0.5 | |
Connection | Inlet | NW40 | NW40 | NW50 | NW100 | NW100 | ISO160 | ISO200 | |
Outlet | NW40 | NW40 | NW40 | NW40 | NW40 | NW40 | NW40 | ||
Approx. Power at Ultimate Pressure | kW | 2.3 | 3 | 3.2 | 3.2 | 4.5 | 4.6 | 4.6 | |
Cooling water | Flow rate | L/min | 5~8 | 5~8 | 5~8 | 5~8 | 5~8 | 5~8 | 5~8 |
Temperature | ℃ | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | |
N2 | Flow rate | Pa•m3/s | 13~18 | 13~18 | 24~29 | 24~29 | 28~31 | 28~31 | 28~31 |
Power Supply Phase/Volt/Freq. |
200V Models | 3-phase/200-220V,50/60Hz | 3-phase/200V/50Hz 3-phase/200-220V/60Hz |
3-phase/200V/50Hz 3-phase/200-220V/60Hz |
3-phase/200V/50Hz 3-phase/200-220V/60Hz |
3-phase/200V/50Hz 3-phase/200-220V/60Hz |
3-phase/200V/50Hz 3-phase/200-220V/60Hz |
3-phase/200V/50Hz 3-phase/200-220V/60Hz |
|
400V Models | 3-phase/380-440V,50/60Hz | 3-phase/380-400V/50Hz 3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz 3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz 3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz 3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz 3-phase/380-440V/60Hz |
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Power capacity | kVA | 4.6 | 7.3 | 8.2 | 8.5 | 12.7 | 15.1 | 16.0 | |
Weight | kg | 260 | 300 | 380 | 430 | 500 | 550 | 840 |