Cleanliness, ISO Class 5 (Class 100), Dust Collecting Efficiency: Over 99.99% of particles with 0.3μm or higher
Filter, Main Filter: Low Pressure Damage HEPA Filter, Pre Filter: Non-woven Fabric (SS-MAC), Salannet (MAC-IIA)
Air Flow: 1.0/0.5 m3/min
Wind speed: 0.48/0.24 m/sec
Size: 9.8 x 10.0 x 5.1 inches (250 x 255.5 x 130 mm)