10-/11-Series, Clean Series
0 It is suitable for clean environment.
0 It prevents dust generation in the cleanroom.
20-Series Copper/Fluorine-Free Specifications
0 Suitable for use in environments that dislike copper and fluorine materials.
0 External dimensions are the same as standard products.
21/22-Series, copper / fluorine / silicone-free + low dust generation
0 It supports environments with restrictions on copper-based, fluorine-based, and silicone-based materials.
0 The structure is the same as the Clean Series (Grease and packaging are different from the Clean Series. )