Specification :
| Model | NS-3600 | ||||
| Objective Lens | Magnification | 10X | 20X | 50X | 100X |
| Observation / Measuring Range | Horizontal (H), um | 1400 | 700 | 280 | 140 |
| Vertical (V), um | 1050 | 525 | 210 | 105 | |
| Working Distance, mm | 17.5 | 4.5 | 1.0 | 1.0 | |
| Numerical Aperture (N. A.) | 0.30 | 0.45 | 0.80 | 0.90 | |
| Optical Zoom | x1 to x6 | ||||
| Optical system for observation / measurement | Pin hole confocal optical system | ||||
| Height Measurement | Scan Range | 10 mm | |||
| Display Resolution | 0.001 um | ||||
| Repeatability, σ | 0.02 um (100 times measurement of 1 um step height standard sample using 100X/0.9 objective) | ||||
| Width Measurement | Display | 0.001 um | |||
| Repeatability, 3σ | 0.03 um (100 times measurement of 5 um pitch standard sample using 100X/0.9 objective) | ||||
| Frame Memory | Pixel Count | 1024x1024, 1024x768, 1024x384, 1024x192, 1024x96 | |||
| For monochrome image | 12 bit | ||||
| For color image | 8 bit for RGB each | ||||
| For height measurement | 16 bit | ||||
| Frame rate | Surface Scan | 20Hz to 160Hz | |||
| Line Scan | ~ 8kHz | ||||
| Laser beam light source for confocal measurement | Wavelength | Red laser, 638 nm | |||
| Output | ~ 2mW | ||||
| Laser class | 3b | ||||
| Laser light receiving element | PMT (Photo Multiplier Tube) | ||||
| Light source for optical observation | Lamp | LED | |||
| Color camera for optical observation | Imaging element | Color CCD image sensor | |||
| Recording Resolution | 1296 x 966 | ||||
| Data Processing unit | Dedicated PC | ||||
| Power Supply | Voltage | 100 to 240 VAC, 50/60 Hz | |||
| Current | 500 VA max | ||||
| Weight | Microscope | ~ 50kg (measuring head unit : ~ 12.5kg) | |||
| Controller | ~ 8 kg | ||||
| Vibration Isolation System | Pneumatic Isolator (optional) | ||||
Malaysia
