Description: FB series molecular pump can obtain clean and ultra-high vacuum pressure without cold trap and oil baffle.
Product info
Introduction:
FB series molecular vacuum pump can obtain clean and ultra-high vacuum pressure without cold trap and oil baffle. EVP can provide three types of molecular pump with distinguished structure as, hybrid molecular pump, turbo molecular pump, and grease lubricated hybrid molecular pump.
Advantage:
For Compound Molecular Pump
1) High pumping speed and compression ration.
2) Being no critical and with no memory effect to pumped gas.
With clean and high (ultra-high) vacuum without cooling trap and oil flap
Application:
It can be widely used in variant vacuum technology field like photovoltaic, lighting, aerospace, semi-conductor, energy, military, laser, home electrics, material, automobile, etc.
Specifications
| Model |
unit |
FB-600 |
FB-1200 |
FB-1600 |
FB-3600 |
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|
High vacuum flange |
mm |
150CF |
160 ISO-K |
200 CF |
200 ISO-K |
250 CF |
250 ISO-K |
400 ISO-K |
|
|
Fore pipe flange |
mm |
40 KF |
40 KF |
50 KF |
100 ISO-K |
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|
Pumping speed |
L/s |
600 |
1200 |
1600 |
3600 |
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|
Compression ration |
N2 |
>109 |
>109 |
>109 |
>108 |
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|
H2 |
>8×103 |
>1×104 |
>1×104 |
>5×102 |
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|
Ultimate pressure |
Torr |
<8×10-8 |
<5×10-7 |
<8×10-8 |
<5×10-7 |
<8×10-8 |
<5×10-7 |
<2×10-6 |
|
|
Rotary Speed |
rpm |
24000 |
24000 |
24000 |
13500 |
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|
Vibration value |
µm |
≤0.1 |
≤0.1 |
≤0.15 |
≤0.15 |
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|
Start-up time |
min |
<4.5 |
<5 |
<6 |
<11 |
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|
Fore pump speed |
L/s |
4-8 |
8-15 |
15 |
30-70 |
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|
Cooling method |
/ |
Air / water |
Air / water |
Air / water |
water |
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|
Ambient temperature(Air) |
℃ |
≤20 |
≤20 |
≤20 |
/ |
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|
Cooling water |
temp. |
℃ |
≤35 |
≤35 |
≤35 |
≤25 |
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|
consum. |
L/m |
1-2 |
1-2 |
1-2 |
2 |
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|
Bake-up temperature |
℃ |
<120 |
<120 |
<120 |
<120 |
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|
Heater |
Power |
Kw |
<250 |
<300 |
<350 |
/ |
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|
voltage |
V |
AC220 |
AC220 |
AC220 |
/ |
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|
Mounting position |
/ |
Vertical ±5° |
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|
Weight |
Kg |
25 |
29 |
31 |
100 |
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