Overview:
The nEXT85 turbomolecular pump builds upon the success of the highly successful EXT75DX to deliver a pump with significantly improved performance in a smaller package.
The rotor has been totally re-designed to optimise pump performance and achieve both higher speeds and higher compression while maintaining high levels of reliability.
In addition to enhanced performance nEXT85 benefits from the same service and operational functionalities from the larger nEXT range, including field serviceability and in-built intelligence, for a truly class leading product.
Features & Benefits:
• Class leading performance in a reduced footprint
• Enhanced customer choice with standard and compression focused variants
• Increased operating envelope maximised by Edwards’ patented direct impeller temperature measurement technology
• Additional flexibility from customised interstage and backing port position selection
• 4 year service with full end-user field serviceability
• CMSD enabled low vibration levels
• Intelligent pumps with included micro USB port and Edwards nST software allowing pump monitoring, control and configuration
• Full suite of tailored accessories
Technical Data:
| NW40 | ISO63 | CF63 | ISO100 | |||||
| Inlet Pumping Speed ls-1 | N2 | 48 | 84 | 85 | ||||
| Ar | 44 | 80 | 80 | |||||
| He | 61 | 79 | 77 | |||||
| H2 | 50 | 61 | 54 | |||||
| Compression Ratio | N2 | >1 x 1011 | ||||||
| Ar | 1 x 109 | |||||||
| He | 8.5 x 106 | |||||||
| H2 | 2.1 x 105 | |||||||
| Interstage Pumping Speed (70 sccm gas load) ls-1 | N2 | 6 | ||||||
| Ar | 6 | |||||||
| He | 9 | |||||||
| H2 | 10 | |||||||
| Backing/Interstage Port Size | NW16 | |||||||
| Vent/Purge Port | NW16 | |||||||
| Maximum Continuous Inlet flow N2 | ||||||||
| Forced Air Cooled (35 oC ambient) | sccm | 30 | ||||||
| Forced Air Cooled (23 oC ambient) | sccm | 60 | ||||||
| Water Cooled (35 oC ambient) | sccm | 50 | ||||||
| Water Cooled (23 oC ambient) | sccm | 60 | ||||||
| Natural Convection (30 oC ambient) | sccm | 10 | ||||||
| Natural Convection (23 oC ambient) | sccm | 25 | ||||||
| Maximum Continuous Backing Pressure N2 | ||||||||
| Forced Air Cooled (35 oC ambient) | mbar | 10 | ||||||
| Forced Air Cooled (23 oC ambient) | mbar | 16 | ||||||
| Water Cooled (35 oC ambient) | mbar | 10 | ||||||
| Water Cooled (23 oC ambient) | mbar | 16 | ||||||
| Natural Convection (30 oC ambient) | mbar | 1 | ||||||
| Natural Convection (23 oC ambient) | mbar | 2 | ||||||
| Start Time to 90% Speed (80 W) | sec | 115 | ||||||
| Nominal Rotational Speed | rpm |
90,000 |
||||||
| Mass | kg |
3.0 |
2.9 | 4.3 | 3.2 | |||
Malaysia
