详情
Overview:
STP-iXR1606 series magnetically levitated turbo-molecular pump provides industry-leading performance and incorporates latest technology small power supply into the onboard control which is the same concept with STP-iXA2206/iXA3306 series. The pumping performance is improved by the newest developed revolutionary rotor design. This fully integrated product offers easy installation and small footprint as an all-in-one solution for all application tools.
Features & Benefits:
-
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Eliminates connection cable between pump and control unit.
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Eliminates installation space and cost required by conventional rack type control unit.
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Compact design results in easy installation and small foot print.
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Highest pumping speed in the 8” TMP class, along with the STP-A1603.
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32% reduced power consumption in the high gas flow area.
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I/O Remote, RS232C, RS485, STP-Link are standard ports
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Profibus and DeviceNet can be selected as options
Technical Data:
|
Intel Flange |
VG150 |
VG200/VG250 |
|
|
ISO160F |
ISO200F/ISO250F |
|
|
ICF203 |
ICF253/ICF305 |
|
Backing port |
KF40 |
KF40 |
|
Pumping Speed |
|
|
|
N2 |
1000 ls-1 |
1600 ls-1 |
|
H2 |
800 ls-1 |
1200 ls-1 |
|
Compression ratio |
|
|
N2 |
>108 |
|
H2 |
1 x 103 |
|
Ultimate pressure |
10-7 Pa (10-9 Torr) |
|
Allowable backing pressure |
266 Pa (2 Torr) |
|
Max Gas size N2 (water cooled only) |
4700 sccm |
|
|
(7.94 Pam3s-1) |
|
Max Gas size Ar (water cooled only) |
1800 sccm |
|
|
(3.04 Pam3s-1) |
|
Rated speed |
36,500 rpm |
|
Starting time |
8 min |
|
Mounting position |
Any orientation |
|
Input voltage |
200 to 240 (± 10) V a.c. |
|
Maximum input power |
750 VA |
|
Weight |
48 kg |
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Malaysia
